Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11366380 | Reflective mask | — | 2022-06-21 |
| 11112344 | Particle measuring method and detection liquid | Hiroshi Tomita, Hidekazu Hayashi, Kaoru Kondo, Takuya TABUCHI, Kazuna BANDO +1 more | 2021-09-07 |
| 9958794 | Manufacturing apparatus of semiconductor device and management method of manufacturing apparatus of semiconductor device | — | 2018-05-01 |
| 9891524 | Semiconductor device and method of manufacturing the same | — | 2018-02-13 |
| 8883405 | Method for forming pattern | — | 2014-11-11 |
| 8753803 | Pattern forming method | Yoshihisa Kawamura, Shinichi Ito | 2014-06-17 |
| 8747682 | Pattern formation method and method for manufacturing semiconductor device | Kentaro Matsunaga, Tomoya Oori, Yukiko Sato, Yoshihisa Kawamura | 2014-06-10 |
| 8419995 | Imprint method | Ikuo Yoneda, Kentaro Matsunaga, Yukiko Kikuchi, Yoshihisa Kawamura, Shinichi Ito +2 more | 2013-04-16 |
| 8329385 | Method of manufacturing a semiconductor device | Keisuke Kikutani, Kazuyuki Yahiro, Kentaro Matsunaga, Tomoya Oori | 2012-12-11 |
| 8198005 | Method of forming resist pattern | Shinichi Ito | 2012-06-12 |
| 8187797 | Method of manufacturing semiconductor device | Shinichi Ito | 2012-05-29 |
| 8158332 | Method of manufacturing a semiconductor device | Kentaro Matsunaga, Tomoya Oori | 2012-04-17 |
| 8097398 | Method for manufacturing semiconductor device | Takehiro Kondoh | 2012-01-17 |
| 8080429 | Evaluation method for chemical solution, qualification method for chemical solution and method for manufacturing semiconductor device | Shinichi Ito | 2011-12-20 |
| 7973907 | Method for treating substrate, method for conveying substrate, and apparatus for conveying substrate | Kentaro Matsunaga, Daisuke Kawamura, Seiro Miyoshi | 2011-07-05 |
| 7968272 | Semiconductor device manufacturing method to form resist pattern | Daisuke Kawamura, Tomoyuki Takeishi, Kei Hayasaki, Yasunobu Onishi, Shinichi Ito +1 more | 2011-06-28 |
| 7851139 | Pattern forming method | Takehiro Kondoh | 2010-12-14 |
| 7794923 | Substrate processing method, substrate processing apparatus, and manufacturing method of semiconductor device | Kentaro Matsunaga, Daisuke Kawamura, Tomoyuki Takeishi, Kei Hayasaki, Shinichi Ito | 2010-09-14 |
| 7779777 | Substrate processing apparatus and method | Hirokazu Kato, Seiro Miyoshi, Shinichi Ito | 2010-08-24 |
| 7687227 | Resist pattern forming method and manufacturing method of semiconductor device | Daisuke Kawamura, Yasunobu Onishi, Shinichi Ito | 2010-03-30 |
| 7687279 | Evaluation method for chemical solution, qualification method for chemical solution and method for manufacturing semiconductor device | Shinichi Ito | 2010-03-30 |
| 7662546 | Apparatus for processing substrate and method of processing the same | Kenji Kawano, Shinichi Ito, Daisuke Kawamura, Kei Hayasaki | 2010-02-16 |
| 7662542 | Pattern forming method and semiconductor device manufacturing method | Takehiro Kondoh, Yuji Kobayashi, Koutarou Sho | 2010-02-16 |
| 7537871 | Method of manufacturing semiconductor device | Kazuya Fukuhara | 2009-05-26 |
| 7527918 | Pattern forming method and method for manufacturing a semiconductor device | Takehiro Kondoh, Tomoyuki Takeishi, Kenji Chiba, Shinichi Ito | 2009-05-05 |