Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373865 | Method for manufacturing semiconductor device having a film with layers of different concentrations of elements | Junichi Hashimoto, Soichi Yamazaki, Yuya Matsubara | 2022-06-28 |
| 11367624 | Manufacturing method of semiconductor device | Junichi Hashimoto, Kaori Narumiya, Kosuke Horibe, Soichi Yamazaki, Kei Watanabe +5 more | 2022-06-21 |
| 9543310 | Semiconductor storage device having communicated air gaps between adjacent memory cells | Satoshi Nagashima | 2017-01-10 |
| 9280049 | Pattern formation method and semiconductor device | — | 2016-03-08 |
| 8975178 | Method of manufacturing a memory device using fine patterning techniques | Keisuke Kikutani, Satoshi Nagashima, Hidefumi Mukai, Hisataka Meguro | 2015-03-10 |
| 8148054 | Immersion multiple-exposure method and immersion exposure system for separately performing multiple exposure of micropatterns and non-micropatterns | — | 2012-04-03 |
| 8097398 | Method for manufacturing semiconductor device | Eishi Shiobara | 2012-01-17 |
| 7851139 | Pattern forming method | Eishi Shiobara | 2010-12-14 |
| 7662542 | Pattern forming method and semiconductor device manufacturing method | Eishi Shiobara, Yuji Kobayashi, Koutarou Sho | 2010-02-16 |
| 7527918 | Pattern forming method and method for manufacturing a semiconductor device | Eishi Shiobara, Tomoyuki Takeishi, Kenji Chiba, Shinichi Ito | 2009-05-05 |
| 6660455 | Pattern formation material, pattern formation method, and exposure mask fabrication method | Masamitsu Itoh | 2003-12-09 |