Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10176290 | Manufacturing method for a semiconductor device, pattern generating method and nontransitory computer readable medium storing a pattern generating program | Takuro URAYAMA, Yoshihiro Yanai | 2019-01-08 |
| 9576100 | Pattern data generation method, pattern verification method, and optical image calculation method | Taiki KIMURA, Hiromitsu Mashita, Fumiharu Nakajima, Tetsuaki Matsunawa, Toshiya Kotani +1 more | 2017-02-21 |
| 9547743 | Manufacturing method for a semiconductor device, pattern generating method and nontransitory computer readable medium storing a pattern generating program | Takuro URAYAMA, Yoshihiro Yanai | 2017-01-17 |
| 9202763 | Defect pattern evaluation method, defect pattern evaluation apparatus, and recording media | Toshiyuki Aritake | 2015-12-01 |
| 9070559 | Pattern forming method and method of manufacturing semiconductor device | Maki Miyazaki, Kentaro Matsunaga | 2015-06-30 |
| 8984454 | Pattern data generation method, pattern verification method, and optical image calculation method | Taiki KIMURA, Hiromitsu Mashita, Fumiharu Nakajima, Tetsuaki Matsunawa, Toshiya Kotani +1 more | 2015-03-17 |
| 8759177 | Pattern forming method | Yoshihiro Yanai, Koichi Matsuno | 2014-06-24 |
| 8423926 | Acceptance determining method of blank for EUV mask and manufacturing method of EUV mask | Takeshi Koshiba, Hidefumi Mukai, Kazunori Iida | 2013-04-16 |
| 8178366 | Pattern forming method, manufacturing method of semiconductor device, and template manufacturing method | Hidefumi Mukai, Takeshi Koshiba | 2012-05-15 |
| 7985685 | Method of manufacturing semiconductor device | Yukiteru Matsui, Masako Kinoshita, Yoshikuni Tateyama, Takeshi Nishioka, Hiroyuki Yano | 2011-07-26 |
| 7973907 | Method for treating substrate, method for conveying substrate, and apparatus for conveying substrate | Kentaro Matsunaga, Daisuke Kawamura, Eishi Shiobara | 2011-07-05 |
| 7779777 | Substrate processing apparatus and method | Eishi Shiobara, Hirokazu Kato, Shinichi Ito | 2010-08-24 |
| 6576375 | Photomask | Tsukasa Azuma, Hideyuki Kanemitsu | 2003-06-10 |
| 6270948 | Method of forming pattern | Yasuhiko Sato, Yoshihiko Nakano, Rikako Kani, Shuji Hayase, Yasunobu Onishi +4 more | 2001-08-07 |
| 6025117 | Method of forming a pattern using polysilane | Yoshihiko Nakano, Rikako Kani, Shuji Hayase, Yasuhiko Sato, Toru Ushirogouchi +5 more | 2000-02-15 |