Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852648 | Mask pattern correction system, and semiconductor device manufacturing method utilizing said correction system | Kazuyuki Hino, Masahiro Miyairi, Hiroshi Yoshimura, Taiga Uno, Sachiyo Ito +4 more | 2020-12-01 |
| 9917049 | Semiconductor device having contacts in drawing area and the contacts connected to word lines extending from element formation area | Fumiharu Nakajima, Toshiya Kotani, Takafumi Taguchi, Ryota Aburada, Chikaaki Kodama | 2018-03-13 |
| 9576100 | Pattern data generation method, pattern verification method, and optical image calculation method | Seiro Miyoshi, Taiki KIMURA, Fumiharu Nakajima, Tetsuaki Matsunawa, Toshiya Kotani +1 more | 2017-02-21 |
| RE46100 | Method of fabricating semiconductor device and semiconductor device | Ryota Aburada, Toshiya Kotani, Chikaaki Kodama | 2016-08-09 |
| 9268208 | Pattern generating method, pattern forming method, and pattern generating program | Ryota Aburada, Taiga Uno, Masahiro Miyairi, Toshiya Kotani | 2016-02-23 |
| 9257367 | Integrated circuit device, method for producing mask layout, and program for producing mask layout | Motohiro Okada, Shuhei Sota, Takaki Hashimoto, Yasunobu Kai, Kazuyuki Masukawa +3 more | 2016-02-09 |
| 9177854 | Method of manufacturing semiconductor device using sidewall films for pitch multiplication in forming interconnects | Fumiharu Nakajima, Toshiya Kotani, Takafumi Taguchi, Ryota Aburada, Chikaaki Kodama | 2015-11-03 |
| 9159726 | Semiconductor memory device and method for manufacturing same | Osamu Yamane, Yoshihiro Yanai | 2015-10-13 |
| 8984454 | Pattern data generation method, pattern verification method, and optical image calculation method | Seiro Miyoshi, Taiki KIMURA, Fumiharu Nakajima, Tetsuaki Matsunawa, Toshiya Kotani +1 more | 2015-03-17 |
| 8617773 | Method of correcting mask pattern, computer program product, and method of manufacturing semiconductor device | Taiga Uno, Toshiya Kotani, Yukiyasu Arisawa | 2013-12-31 |
| 8617999 | Method of manufacturing semiconductor device and computer readable medium for storing pattern size setting program | Toshiya Kotani, Fumiharu Nakajima, Takafumi Taguchi, Chikaaki Kodama | 2013-12-31 |
| 8443310 | Pattern correcting method, mask forming method, and method of manufacturing semiconductor device | Masanari Kajiwara, Toshiya Kotani, Sachiko Kobayashi, Fumiharu Nakajima | 2013-05-14 |
| 8347241 | Pattern generation method, computer-readable recording medium, and semiconductor device manufacturing method | Fumiharu Nakajima, Toshiya Kotani, Chikaaki Kodama | 2013-01-01 |
| 8336005 | Pattern dimension calculation method and computer program product | Takafumi Taguchi, Toshiya Kotani, Fumiharu Nakajima, Ryota Aburada, Chikaaki Kodama | 2012-12-18 |
| 8307310 | Pattern generating method, method of manufacturing semiconductor device, computer program product, and pattern-shape-determination-parameter generating method | Toshiya Kotani, Takafumi Taguchi, Ryuji Ogawa | 2012-11-06 |
| 8283791 | Semiconductor device and method for manufacturing same | Takayuki Toba, Tohru Ozaki, Toshiki Hisada, Takafumi Taguchi | 2012-10-09 |
| 8266552 | Pattern generating method, method of manufacturing semiconductor device, and recording medium | Takafumi Taguchi, Toshiya Kotani, Michiya Takimoto, Fumiharu Nakajima, Ryota Aburada +2 more | 2012-09-11 |
| 8243491 | Semiconductor integrated circuit including semiconductor memory | Toshiki Hisada | 2012-08-14 |
| 8196071 | Creating mask data of integrated circuit patterns using calculated etching conversion difference | Katsumi Iyanagi, Takafumi Taguchi, Toshiya Kotani, Hidefumi Mukai, Taiga Uno +1 more | 2012-06-05 |
| 8183148 | Method of fabricating semiconductor device and semiconductor device | Ryota Aburada, Toshiya Kotani, Chikaaki Kodama | 2012-05-22 |
| 8143171 | Method for manufacturing semiconductor device and computer readable medium for storing pattern size setting program | Toshiya Kotani, Fumiharu Nakajima, Takafumi Taguchi, Chikaaki Kodama | 2012-03-27 |
| 8146022 | Mask pattern data generation method, mask manufacturing method, semiconductor device manufacturing method, and pattern data generation program | Toshiya Kotani, Takashi Obara | 2012-03-27 |
| 8108824 | Pattern verification method, method of manufacturing semiconductor device, and recording media | Toshiya Kotani, Kazuhito Kobayashi | 2012-01-31 |
| 7941782 | Pattern layout of integrated circuit | Yasunobu Kai, Kazuo Hatakeyama, Hidefumi Mukai, Koji Hashimoto | 2011-05-10 |
| 7831953 | Lithography simulation method, program and semiconductor device manufacturing method | Masaki Satake, Satoshi Tanaka | 2010-11-09 |