Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852648 | Mask pattern correction system, and semiconductor device manufacturing method utilizing said correction system | Kazuyuki Hino, Hiromitsu Mashita, Masahiro Miyairi, Hiroshi Yoshimura, Sachiyo Ito +4 more | 2020-12-01 |
| 9268208 | Pattern generating method, pattern forming method, and pattern generating program | Ryota Aburada, Hiromitsu Mashita, Masahiro Miyairi, Toshiya Kotani | 2016-02-23 |
| 9257367 | Integrated circuit device, method for producing mask layout, and program for producing mask layout | Motohiro Okada, Shuhei Sota, Takaki Hashimoto, Yasunobu Kai, Kazuyuki Masukawa +3 more | 2016-02-09 |
| 8617773 | Method of correcting mask pattern, computer program product, and method of manufacturing semiconductor device | Toshiya Kotani, Hiromitsu Mashita, Yukiyasu Arisawa | 2013-12-31 |
| 8527914 | Flare map calculating method and recording medium | Toshiya Kotani, Satoshi Tanaka | 2013-09-03 |
| 8507160 | Flare prediction method, photomask manufacturing method, semiconductor device manufacturing method, and computer-readable medium | Yukiyasu Arisawa | 2013-08-13 |
| 8443311 | Flare value calculation method, flare correction method, and computer program product | Yukiyasu Arisawa | 2013-05-14 |
| 8196071 | Creating mask data of integrated circuit patterns using calculated etching conversion difference | Hiromitsu Mashita, Katsumi Iyanagi, Takafumi Taguchi, Toshiya Kotani, Hidefumi Mukai +1 more | 2012-06-05 |
| 8039177 | Method of correcting a flare and computer program product | Yukiyasu Arisawa, Hajime Aoyama | 2011-10-18 |
| 6622297 | Pattern correcting method and pattern verifying method | Kazuko Yamamoto, Sachiko Kobayashi, Satoshi Tanaka | 2003-09-16 |
| 6243855 | Mask data design method | Sachiko Kobayashi, Kazuko Yamamoto, Koji Hashimoto | 2001-06-05 |
| 6004701 | Method for designing Levenson photomask | Kiyomi Koyama, Kazuko Yamamoto, Satoshi Tanaka, Sachiko Kobayashi, Koji Hashimoto | 1999-12-21 |
| 5795683 | Method and a system for designing a photomask for use in manufacture of a semiconductor device | Kiyomi Koyama, Kazuko Yamamoto | 1998-08-18 |