Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10290498 | Imprint apparatus and imprint method | Satoshi Mitsugi, Takeshi Suto, Takashi Sato | 2019-05-14 |
| 8617773 | Method of correcting mask pattern, computer program product, and method of manufacturing semiconductor device | Taiga Uno, Toshiya Kotani, Hiromitsu Mashita | 2013-12-31 |
| 8507160 | Flare prediction method, photomask manufacturing method, semiconductor device manufacturing method, and computer-readable medium | Taiga Uno | 2013-08-13 |
| 8443311 | Flare value calculation method, flare correction method, and computer program product | Taiga Uno | 2013-05-14 |
| 8039177 | Method of correcting a flare and computer program product | Taiga Uno, Hajime Aoyama | 2011-10-18 |
| 7941767 | Photomask management method and photomask wash limit generating method | Hidefumi Mukai, Shinji Yamaguchi, Toshiya Kotani | 2011-05-10 |
| 7912275 | Method of evaluating a photo mask and method of manufacturing a semiconductor device | Hiroki Yamamoto, Masamitsu Itoh, Osamu Ikenaga, Shoji Mimotogi, Hideki Kanai | 2011-03-22 |
| 7636910 | Photomask quality estimation system and method for use in manufacturing of semiconductor device, and method for manufacturing the semiconductor device | Tadahito Fujisawa, Shoji Mimotogi | 2009-12-22 |
| 7446852 | Projection exposure mask acceptance decision system, projection exposure mask acceptance decision method, method for manufacturing semiconductor device, and computer program project | Shoji Mimotogi, Shigeru Hasebe | 2008-11-04 |