Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12078922 | Template, workpiece, and alignment method | Takashi Sato, Satoshi Mitsugi | 2024-09-03 |
| 10782621 | Imprint method, imprint apparatus, and template | Mitsuko Shimizu, Takashi Sato, Akiko Mimotogi, Akiko Yamada | 2020-09-22 |
| 10290498 | Imprint apparatus and imprint method | Satoshi Mitsugi, Takashi Sato, Yukiyasu Arisawa | 2019-05-14 |
| 9500961 | Pattern formation method and exposure apparatus | Takashi Sato, Akiko Yamada | 2016-11-22 |
| 6869678 | Removable pressure-sensitive adhesive and adhesive sheet of the same | Takeshi Yamanaka, Shinetsu Itou, Kenichi Shibata, Isamu Miyoshi | 2005-03-22 |
| 5807468 | Anode electrolysis electrode material using precious metal-based amorphous alloy suitable for plastic processing and applicable to a bulk member | Takumi Sakamoto, Takahiro Aoki, Nobuyuki Nishiyama, Akihisa Inoue, Hisamichi Kimura +3 more | 1998-09-15 |
| 4931830 | Projection exposure apparatus | Kyoichi Suwa, Kazuo Ushida, Masaomi Kameyama, Shigeru Hirukawa, Shinichi Nakamura | 1990-06-05 |
| 4748333 | Surface displacement sensor with opening angle control | Hideo Mizutani, Shoji Ishizaka | 1988-05-31 |
| 4744662 | Apparatus for measuring dimensions of micropattern | Masato Kumazawa, Tatsumi Ishizeki | 1988-05-17 |
| 4732484 | Apparatus for measuring the dimensions of a minute object | — | 1988-03-22 |