Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4769551 | Pattern detecting apparatus utilizing energy beam | Muneki Hamashima, Kinya Kato, Kou Sekiba, Hiroaki Iseya | 1988-09-06 |
| 4744662 | Apparatus for measuring dimensions of micropattern | Takeshi Suto, Masato Kumazawa | 1988-05-17 |
| 4730927 | Method and apparatus for measuring positions on the surface of a flat object | Taro Ototake | 1988-03-15 |