Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5786897 | Method and device for measuring pattern coordinates of a pattern formed on a pattern surface of a substrate | — | 1998-07-28 |
| 5459577 | Method of and apparatus for measuring pattern positions | Takashi Endo, Hisao Izawa, Kazuhiro Takaoka | 1995-10-17 |
| 5386294 | Pattern position measuring apparatus | Yasuko Maeda, Takakazu Ueki | 1995-01-31 |
| 4730927 | Method and apparatus for measuring positions on the surface of a flat object | Tatsumi Ishizeki | 1988-03-15 |