Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5539521 | Method of and apparatus for measuring pattern positions | Taro Otokake, Takashi Endo, Kazuhiro Takaoka | 1996-07-23 |
| 5459577 | Method of and apparatus for measuring pattern positions | Taro Ototake, Takashi Endo, Kazuhiro Takaoka | 1995-10-17 |
| 4685805 | Small gap measuring apparatus | Kenichi Kodama, Akikazu Tanimoto, Yoichi Hamashima, Junji Hazama | 1987-08-11 |
| 4636626 | Apparatus for aligning mask and wafer used in semiconductor circuit element fabrication | Junji Hazama, Kinya Kato, Akikazu Tanimoto | 1987-01-13 |
| 4598242 | Mask feed method and apparatus for exposure replicate systems | Yutaka Hayashi | 1986-07-01 |
| 4537501 | Apparatus for the attitude control of plate-form body | Yukio Kakizaki, Junji Hazama | 1985-08-27 |