Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8749753 | Movable body apparatus, exposure apparatus and optical system unit, and device manufacturing method | Keiichi Tanaka | 2014-06-10 |
| 6583597 | Stage apparatus including non-containing gas bearings and microlithography apparatus comprising same | Keiichi Tanaka, Yukiharu Okubo, Hiroaki Narushima, Yasushi Yoda | 2003-06-24 |
| 6570641 | Projection exposure apparatus | Tomohide Hamada, Hiroshi Shirasu, Kinya Kato | 2003-05-27 |
| 6317196 | Projection exposure apparatus | Tomohide Hamada, Hiroshi Shirasu, Kinya Kats | 2001-11-13 |
| RE37352 | Projection optical apparatus | Kazuaki Suzuki, Tetsuo Taniguchi | 2001-09-04 |
| 6049372 | Exposure apparatus | Kinya Kato, Hiroshi Shirasu, Kei Nara | 2000-04-11 |
| 6040096 | Mask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatus | Toru Kiuchi, Kesayoshi Amano, Toshikazu Umatate | 2000-03-21 |
| 5929973 | Apparatus and method for simultaneously transferring a mask pattern to both sides of a substrate | Hidetoshi Mori | 1999-07-27 |
| 5894056 | Mask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatus | Toru Kiuchi, Kesayoshi Amano, Toshikazu Umatate | 1999-04-13 |
| 5617211 | Exposure apparatus | Kei Nara, Toshio Matsuura, Muneyasu Yokota, Yoshio Fukami, Seiji Miyazaki +1 more | 1997-04-01 |
| 5337097 | Projection optical apparatus | Kazuaki Suzuki, Tetsuo Taniguchi | 1994-08-09 |
| 4803373 | Conveyor arm apparatus with gap detection | Kazunori Imamura, Fuminori Hayano, Jiro Kobayashi | 1989-02-07 |
| 4776693 | Foreign substance inspecting system including a calibration standard | Kazunori Imamura, Akikazu Tanimoto | 1988-10-11 |
| 4770531 | Stage device with levelling mechanism | Hiroshi Tanaka | 1988-09-13 |
| 4723846 | Optical path length compensating optical system in an alignment apparatus | Makoto Uehara, Kazumasa Endo, Susumu Mori, Shuhei Takagi | 1988-02-09 |
| 4716299 | Apparatus for conveying and inspecting a substrate | Hiroshi Tanaka, Hiromitsu Iwata | 1987-12-29 |
| 4655584 | Substrate positioning apparatus | Hiroshi Tanaka, Hiromitsu Iwata, Tsuyoshi Naraki | 1987-04-07 |
| 4537501 | Apparatus for the attitude control of plate-form body | Hisao Izawa, Junji Hazama | 1985-08-27 |
| 4422547 | Container for holding substrate | Nobutoshi Abe, Jiro Kobayashi | 1983-12-27 |