Issued Patents All Time
Showing 25 most recent of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832977 | Display element manufacturing method and manufacturing apparatus | Tomohide Hamada | 2020-11-10 |
| 10683185 | Processing system and device manufacturing method | Yoshiaki Kito, Masaki Kato, Masakazu Hori | 2020-06-16 |
| 10438814 | Method for manufacturing wiring pattern, method for manufacturing transistor, and member for transfer | Makoto NAKAZUMI, Yasutaka Nishi | 2019-10-08 |
| 10246287 | Processing system and device manufacturing method | Yoshiaki Kito, Masaki Kato, Masakazu Hori | 2019-04-02 |
| 9917023 | Display element manufacturing method and manufacturing apparatus | Tomohide Hamada | 2018-03-13 |
| 9310656 | Method for manufacturing display element, manufacturing apparatus of display element and display device | Tomohide Hamada | 2016-04-12 |
| 9178155 | Flexible substrate, manufacturing method of display element, and manufacturing apparatus of display element | Tomohide Hamada, Masaki Kato, Tohru Kiuchi | 2015-11-03 |
| 9172063 | Method and apparatus for manufacturing display devices | Tomohide Hamada | 2015-10-27 |
| 9086585 | Display element manufacturing method and manufacturing apparatus | Tomohide Hamada | 2015-07-21 |
| 8926387 | Defect detection method of display device and defect detection apparatus of display device | Tomohide Hamada | 2015-01-06 |
| 8917378 | Exposure method, exposure apparatus, and method for producing device with plurality of projection optical systems and pattern having first partial pattern area and second partial area having overlaid area with first partial pattern area | — | 2014-12-23 |
| 8456617 | Exposure method, exposure device, and micro device manufacturing method | — | 2013-06-04 |
| 8432528 | Method for manufacturing display element, manufacturing apparatus of display element and display device | Tomohide Hamada | 2013-04-30 |
| 8349672 | Display element manufacturing method and manufacturing apparatus, thin film transistor manufacturing method and manufacturing apparatus, and circuit forming apparatus | Tomohide Hamada | 2013-01-08 |
| 8301289 | Defect detection method of display device and defect detection apparatus of display device | Tomohide Hamada | 2012-10-30 |
| 8262974 | Method for manufacturing display element and manufacturing apparatus of display element | Tomohide Hamada | 2012-09-11 |
| 6437354 | Exposure method and scanning-type exposure apparatus | Hirokazu Kato | 2002-08-20 |
| RE37762 | Scanning exposure apparatus and exposure method | Seiji Miyazaki, Masami Seki, Masamitsu Yanagihara, Tomohide Hamada | 2002-06-25 |
| 6342943 | Exposure apparatus | — | 2002-01-29 |
| 6341011 | Exposure method | — | 2002-01-22 |
| 6239861 | Exposure method and scanning type exposure apparatus | Tsuyoshi Naraki | 2001-05-29 |
| 6204912 | Exposure method, exposure apparatus, and mask | Makoto Tsuchiya, Nobutaka Fujimori, Manabu Toguchi, Masami Seki | 2001-03-20 |
| 6141082 | Alignment method, exposure method, and exposure apparatus | Seiji Miyazaki, Hideki Koitabashi | 2000-10-31 |
| 6049372 | Exposure apparatus | Kinya Kato, Hiroshi Shirasu, Yukio Kakizaki | 2000-04-11 |
| 5985496 | Exposure method and apparatus | Toshio Matsuura | 1999-11-16 |