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Warp backed weave denim |
Shu Ono, Toshinari Nagura |
2005-07-19 |
| RE37762 |
Scanning exposure apparatus and exposure method |
Seiji Miyazaki, Kei Nara, Masamitsu Yanagihara, Tomohide Hamada |
2002-06-25 |
| RE37361 |
Scanning type exposure apparatus and exposure method |
Masamitsu Yanagihara, Susumu Mori, Tsuyoshi Naraki, Seiji Miyazaki, Tsuyohsi Narabe +1 more |
2001-09-11 |
| 6204912 |
Exposure method, exposure apparatus, and mask |
Makoto Tsuchiya, Kei Nara, Nobutaka Fujimori, Manabu Toguchi |
2001-03-20 |
| 5959784 |
Optical projection systems and projection-exposure apparatus comprising same |
Hiroshi Chiba |
1999-09-28 |
| 5640227 |
Exposure apparatus and exposure method for minimizing defocusing of the transferred pattern |
Kinya Kato, Kazuaki Saiki, Masaki Kato |
1997-06-17 |
| 5625436 |
Scanning type exposure apparatus and exposure method |
Masamitsu Yanagihara, Susumu Mori, Tsuyoshi Naraki, Seiji Miyazaki, Tsuyoshi Narabe +1 more |
1997-04-29 |
| 5614988 |
Projection exposure apparatus and method with a plurality of projection optical units |
Kinya Kato |
1997-03-25 |
| 5602620 |
Scanning exposure apparatus and exposure method |
Seiji Miyazaki, Kei Nara, Masamitsu Yanagihara |
1997-02-11 |