Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9188878 | Driving system and driving method, exposure apparatus and exposure method, and driving system design method | Hiroshi Fujimoto, Koichi Sakata | 2015-11-17 |
| 8805556 | Damping apparatus and exposure apparatus | Ping-Wei Chang | 2014-08-12 |
| 6744511 | Stage device having drive mechanism for driving a movable stage, and exposure apparatus and method of detecting position of the stage | Tomohide Hamada | 2004-06-01 |
| 6606146 | Stage device, exposure apparatus incorporating the stage device, and method of using the same | — | 2003-08-12 |
| 6509953 | Apparatus for exposing a pattern onto an object with controlled scanning | Bausan Yuan | 2003-01-21 |
| 6320345 | Command trajectory for driving a stage with minimal vibration | Bausan Yuan, Henry K. Chau | 2001-11-20 |
| 6084244 | Scanning exposure apparatus that compensates for positional deviation caused by substrate inclination | Tomohide Hamada | 2000-07-04 |
| 6008610 | Position control apparatus for fine stages carried by a coarse stage on a high-precision scanning positioning system | Bausan Yuan | 1999-12-28 |
| 5920378 | Projection exposure apparatus | Masaichi Murakami, Hiroshi Shirasu, Tomohide Hamada, Susumu Mori | 1999-07-06 |
| 5798822 | Exposure apparatus | Seiji Miyazaki, Hiroshi Shirasu, Tsuyoshi Narabe | 1998-08-25 |
| 5777722 | Scanning exposure apparatus and method | Seiji Miyazaki, Tsuyoshi Narabe, Kei Nara, Tomohide Hamada, Hideji Goto +1 more | 1998-07-07 |
| 5715037 | Scanning exposure apparatus | Susumu Mori, Hiroshi Shirasu | 1998-02-03 |
| 5657130 | Exposure apparatus and method | Hiroshi Shirasu, Seiji Miyazaki, Susumu Mori | 1997-08-12 |
| 5640227 | Exposure apparatus and exposure method for minimizing defocusing of the transferred pattern | Kinya Kato, Masami Seki, Masaki Kato | 1997-06-17 |
| 4577141 | System for driving a movable stage | Aiichi Ishikawa, Noriyoshi Hashimoto, Koichi Kudo, Kuniyuki Yoshikawa | 1986-03-18 |
| 4486078 | Driving device for a revolver in a microscope | Noriyoshi Hashimoto | 1984-12-04 |