Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6988060 | Alignment simulation | Paul Derek Coon, Arun Ananth Aiyer | 2006-01-17 |
| 6320345 | Command trajectory for driving a stage with minimal vibration | Bausan Yuan, Kazuaki Saiki | 2001-11-20 |
| 5936254 | Thin film detection method and apparatus | Arun A. Aiyer, John H. McCoy | 1999-08-10 |
| 5859698 | Method and apparatus for macro defect detection using scattered light | Arun Ananth Aiyer | 1999-01-12 |
| 5838448 | CMP variable angle in situ sensor | Arun Ananth Aiyer, Paul Derek Coon | 1998-11-17 |
| 5777729 | Wafer inspection method and apparatus using diffracted light | Arun Ananth Aiyer, John H. McCoy, Kyoichi Suwa | 1998-07-07 |