Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11703461 | Optical sensor for surface inspection and metrology | — | 2023-07-18 |
| 11561080 | Optical sensor for surface inspection and metrology | — | 2023-01-24 |
| 11442025 | Optical sensor for surface inspection and metrology | — | 2022-09-13 |
| 6733370 | In-situ pad conditioning apparatus for CMP polisher | — | 2004-05-11 |
| 6302770 | In-situ pad conditioning for CMP polisher | — | 2001-10-16 |
| 6261152 | Heterdoyne Thickness Monitoring System | — | 2001-07-17 |
| 6248000 | Polishing pad thinning to optically access a semiconductor wafer surface | — | 2001-06-19 |
| 5936254 | Thin film detection method and apparatus | John H. McCoy, Henry K. Chau | 1999-08-10 |
| 5729343 | Film thickness measurement apparatus with tilting stage and method of operation | — | 1998-03-17 |
| 5698069 | Technique for detecting particles on a wafer support surface | Kyoichi Suwa | 1997-12-16 |
| 5453814 | Illumination source and method for microlithography | — | 1995-09-26 |