Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11401450 | Fluid synthesis system | Takashi Nagata, Ting-Chien Teng, Nobutaka Magome | 2022-08-02 |
| 11223303 | Motor with force constant modeling and identification for flexible mode control | Pai-Hsueh Yang, Tsutomu Ogiwara, Kazuhiro Hirano | 2022-01-11 |
| 10477128 | Neighborhood haze density estimation for single-image dehaze | Ripul Bhutani, Ping-Wei Chang | 2019-11-12 |
| 9465305 | Method for determining a commutation offset and for determining a compensation map for a stage | Pai-Hsueh Yang, Scott Coakley, Michael Binnard, Kazuhiro Hirano, Shiang-Lung Koo | 2016-10-11 |
| 9013134 | Method for determing a commutation offset and for determining a compensation map for a stage | Pai-Hsueh Yang, Scott Coakley, Michael Binnard, Kazuhiro Hirano, Shiang-Lung Koo | 2015-04-21 |
| 8836252 | Linearized control of piezoelectric actuator to reduce hysteresis | Yi-Ping Hsin, Susumu Isago | 2014-09-16 |
| 8767172 | Projection optical device and exposure apparatus | Akimitsu Ebihara, Martin E. Lee | 2014-07-01 |
| 8619361 | Direct derivative feedforward vibration compensation system | Yi-Ping Hsin, Susumu Isago, Kazuo Masaki | 2013-12-31 |
| 8582080 | Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage | Michael Binnard, Wen-Hou Ma, Toshio Ueta, Pai-Hsueh Yang, Ting-Chien Teng | 2013-11-12 |
| 8140288 | On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage | Pai-Hsueh Yang, Kazuo Masaki, Kazuhiro Hirano, Xiao-Feng Yang, Scott Coakley +1 more | 2012-03-20 |
| 7989756 | Active-isolation mounts for optical elements | Shiang-Lung Koo, Yi-Ping Hsin, Hideyuki Hashimoto, Pai-Hsueh Yang | 2011-08-02 |
| 7876452 | Interferometric position-measuring devices and methods | Michael Sogard, Masahiko Okumura, Yosuke Shirata, Kiyoshi Uchikawa, Saburo Kamiya +1 more | 2011-01-25 |
| 7583361 | System for controlling a dual mover assembly for an exposure apparatus | Yi-Ping Hsin, Hideyuki Hashimoto, Jin Nishikawa, Douglas C. Watson | 2009-09-01 |
| 7417714 | Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage | Michael Binnard, Wen-Hou Ma, Toshio Ueta, Pai-Hsueh Yang, Ting-Chien Teng | 2008-08-26 |
| 7366642 | Minimum force output control method for counter-mass with cable | Yi-Ping Hsin, Gabor Szoboszlay, Kazuhiro Hirano, Kazuo Masaki, Christopher Blake Smith +1 more | 2008-04-29 |
| 7333179 | Moving mechanism with high bandwidth response and low force transmissibility | Martin E. Lee, W. Thomas Novak | 2008-02-19 |
| 7253576 | E/I core actuator commutation formula and control method | Pai-Hsueh Yang, Kazuhiro Hirano, Ping-Wei Chang, Tim Teng | 2007-08-07 |
| 7172493 | Fine force actuator assembly for chemical mechanical polishing apparatuses | W. Thomas Novak, Douglas C. Watson, Pai-Hsueh Yang | 2007-02-06 |
| 7061577 | Image adjustor including damping assembly | Martin E. Lee, Takeshi Asami | 2006-06-13 |
| 7034474 | Auto-calibration of attraction-only type actuator commutations | Pai-Hsueh Yang, Tim Teng, Kazuhiro Hirano | 2006-04-25 |
| 6987558 | Reaction mass for a stage device | Michael Binnard | 2006-01-17 |
| 6963821 | Stage counter mass system | Michael Binnard, W. Thomas Novak, Toshio Ueta | 2005-11-08 |
| 6927505 | Following stage planar motor | Michael Binnard | 2005-08-09 |
| 6855032 | Fine force control of actuators for chemical mechanical polishing apparatuses | Pai-Hsueh Yang | 2005-02-15 |
| 6686990 | Scanning exposure method with reduced time between scans | Andrew J. Hazelton | 2004-02-03 |