Issued Patents All Time
Showing 25 most recent of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10185222 | Liquid jet and recovery system for immersion lithography | W. Thomas Novak, Andrew J. Hazelton | 2019-01-22 |
| 9958786 | Cleanup method for optics in immersion lithography using object on wafer holder in place of wafer | Hidemi Kawai | 2018-05-01 |
| 9910370 | Environmental system including a transport region for an immersion lithography apparatus | W. Thomas Novak, Andrew J. Hazelton | 2018-03-06 |
| 9785057 | Liquid jet and recovery system for immersion lithography | W. Thomas Novak, Andrew J. Hazelton | 2017-10-10 |
| 9644720 | Orientation independent focus mechanisms for laser radar | Alec Paul Robertson, Alexander Cooper | 2017-05-09 |
| 9632427 | Environmental system including a transport region for an immersion lithography apparatus | W. Thomas Novak, Andrew J. Hazelton | 2017-04-25 |
| 9341942 | Vacuum chamber assembly for supporting a workpiece | Fardad Hashemi | 2016-05-17 |
| 9323157 | Mirror assembly for an exposure apparatus | Alton H. Phillips | 2016-04-26 |
| 9304409 | Liquid jet and recovery system for immersion lithography | W. Thomas Novak, Andrew J. Hazelton | 2016-04-05 |
| 9304385 | Exposure method and device manufacturing method including selective deformation of a mask | Alton H. Phillips, Hiromitsu Yoshimoto, Yusaku Uehara | 2016-04-05 |
| 9298077 | Reaction assembly for a stage assembly | — | 2016-03-29 |
| 8941814 | Multiple-blade holding devices | Fardad Hashemi, Christopher S. Margeson | 2015-01-27 |
| 8937289 | High heat load optics with vibration isolated hoses in an extreme ultraviolet lithography system | Travis Bow | 2015-01-20 |
| 8853988 | Control systems and methods for compensating for effects of a stage motor | Michael Binnard, Scott Coakley, Pai-Hsueh Yang | 2014-10-07 |
| 8830443 | Environmental system including a transport region for an immersion lithography apparatus | W. Thomas Novak, Andrew J. Hazelton | 2014-09-09 |
| 8794011 | Method and apparatus for utilizing in-situ measurements techniques in conjunction with thermoelectric chips (TECs) | Alton H. Phillips, Akio Ohta | 2014-08-05 |
| 8767174 | Temperature-controlled holding devices for planar articles | Michael Sogard, Alton H. Phillips | 2014-07-01 |
| 8705170 | High NA catadioptric imaging optics for imaging A reticle to a pair of imaging locations | David M. Williamson, Michael Binnard | 2014-04-22 |
| 8441615 | System for isolating an exposure apparatus | Fardad Hashemi, Christopher S. Margeson | 2013-05-14 |
| 8425060 | Self-correcting optical elements for high-thermal-load optical systems | Alton H. Phillips | 2013-04-23 |
| 8416386 | Conforming seats for clamps used in mounting an optical element, and optical systems comprising same | Christopher S. Margeson | 2013-04-09 |
| 8085381 | Cleanup method for optics in immersion lithography using sonic device | Hidemi Kawai, W Thomas Novak | 2011-12-27 |
| 8059258 | Liquid jet and recovery system for immersion lithography | W. Thomas Novak, Andrew J. Hazelton | 2011-11-15 |
| 7969552 | Environmental system including a transport region for an immersion lithography apparatus | W. Thomas Novak, Andrew J. Hazelton | 2011-06-28 |
| 7965376 | Environmental system including a transport region for an immersion lithography apparatus | W. Thomas Novak, Andrew J. Hazelton | 2011-06-21 |