Issued Patents All Time
Showing 25 most recent of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12275066 | Systems and methods for improved melting in three-dimensional printing processes | Eric Peter Goodwin | 2025-04-15 |
| 12151378 | Vibration reduction system for precision robotics applications | Michael Binnard, Yoon Jung Jeong | 2024-11-26 |
| 12066677 | Balanced active stabilizers | Yoon Jung Jeong, Michael Binnard, Matthew Parker-McCormick Bjork | 2024-08-20 |
| 12055193 | Vibration isolation systems with reaction masses and actuators | Michael Binnard, Yoon Jung Jeong, Matthew Parker-McCormick Bjork | 2024-08-06 |
| 10687852 | Separable instrument driver handle | John Conley | 2020-06-23 |
| 10335169 | Angled orthopaedic driver | John Conley | 2019-07-02 |
| 10289007 | Lithography tool having a reticle stage capable of dynamic reticle bending to compensate for distortion | Yuichi Shibazaki | 2019-05-14 |
| 10121760 | Wafer bonding system and method | — | 2018-11-06 |
| 10114193 | Fly's eye optical mirror with a plurality of optical elements rotationally aligned along two axes | — | 2018-10-30 |
| 9947637 | System and method for clamping wafers together in alignment using pressure | Fardad Hashemi | 2018-04-17 |
| 9323157 | Mirror assembly for an exposure apparatus | Douglas C. Watson | 2016-04-26 |
| 9304385 | Exposure method and device manufacturing method including selective deformation of a mask | Douglas C. Watson, Hiromitsu Yoshimoto, Yusaku Uehara | 2016-04-05 |
| 9041900 | High heat load optics with a liquid metal interface for use in an extreme ultraviolet lithography system | — | 2015-05-26 |
| 9041904 | High heat load optics with a liquid metal interface for use in an extreme ultraviolet lithography system | — | 2015-05-26 |
| 8847721 | Thermally conductive coil and methods and systems | Alexander Cooper, Scott Coakley | 2014-09-30 |
| 8794011 | Method and apparatus for utilizing in-situ measurements techniques in conjunction with thermoelectric chips (TECs) | Akio Ohta, Douglas C. Watson | 2014-08-05 |
| 8767174 | Temperature-controlled holding devices for planar articles | Michael Sogard, Douglas C. Watson | 2014-07-01 |
| 8739383 | Method and apparatus for aligning mirror blocks of a multi-element mirror assembly | — | 2014-06-03 |
| 8619234 | Utilities transfer system in a lithography system | — | 2013-12-31 |
| 8425060 | Self-correcting optical elements for high-thermal-load optical systems | Douglas C. Watson | 2013-04-23 |
| 8284379 | Devices and methods for reducing residual reticle chucking forces | — | 2012-10-09 |
| 8002420 | Hydrostatic liquid-metal deformable optical elements | — | 2011-08-23 |
| 7804583 | EUV reticle handling system and method | Michael Sogard, Douglas C. Watson | 2010-09-28 |
| 7773198 | Filtered device container assembly with shield for a reticle | — | 2010-08-10 |
| 7728462 | Monolithic stage devices providing motion in six degrees of freedom | Mark E. Williams | 2010-06-01 |