Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9304385 | Exposure method and device manufacturing method including selective deformation of a mask | Alton H. Phillips, Douglas C. Watson, Hiromitsu Yoshimoto | 2016-04-05 |
| 8253924 | Exposure method, exposure apparatus and device manufacturing method | Kousuke Suzuki, Katsushi Nakano, Yasuhiro Omura | 2012-08-28 |
| 7817249 | Exposure method and apparatus, and device producing method using two light beams to correct non-rotationally symmetric aberration | — | 2010-10-19 |