Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360394 | Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium | Mineyuki Nishino, Satoshi Takahashi | 2022-06-14 |
| 10942457 | Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium | Mineyuki Nishino, Satoshi Takahashi | 2021-03-09 |
| 10642159 | Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium | Mineyuki Nishino, Satoshi Takahashi | 2020-05-05 |
| 10061214 | Exposure apparatus, exposure method, exposure apparatus maintenance method, exposure apparatus adjustment method and device manufacturing method | Natsuko Sagawa, Kenichi Shiraishi | 2018-08-28 |
| 9746781 | Exposure apparatus and method for producing device | Hirotaka Kohno, Takeshi Okuyama, Hiroyuki Nagasaka | 2017-08-29 |
| 9720332 | Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium | Mineyuki Nishino, Satoshi Takahashi | 2017-08-01 |
| 8941808 | Immersion lithographic apparatus rinsing outer contour of substrate with immersion space | Masahiko Okumura, Tarou Sugihara, Takeyuki Mizutani, Tomoharu Fujiwara | 2015-01-27 |
| 8780327 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Soichi Owa | 2014-07-15 |
| 8760617 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Soichi Owa | 2014-06-24 |
| 8514366 | Exposure method and apparatus, maintenance method and device manufacturing method | — | 2013-08-20 |
| 8384877 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Soichi Owa | 2013-02-26 |
| 8305553 | Exposure apparatus and device manufacturing method | Tsuneyuki Hagiwara | 2012-11-06 |
| 8294873 | Exposure method, device manufacturing method, and substrate | — | 2012-10-23 |
| 8253924 | Exposure method, exposure apparatus and device manufacturing method | Yusaku Uehara, Kousuke Suzuki, Yasuhiro Omura | 2012-08-28 |
| 8174668 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Soichi Owa | 2012-05-08 |
| 8169592 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Soichi Owa | 2012-05-01 |
| 8130363 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Soichi Owa | 2012-03-06 |
| 8111374 | Analysis method, exposure method, and device manufacturing method | — | 2012-02-07 |
| 8072576 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Soichi Owa | 2011-12-06 |
| 8053937 | Linear motor, stage apparatus and exposure apparatus | Shigeru Morimoto, Shigeki Kageyama | 2011-11-08 |
| 8040489 | Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid | Masahiko Okumura, Tarou Sugihara, Takeyuki Mizutani, Tomoharu Fujiwara | 2011-10-18 |
| 7388649 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Soichi Owa | 2008-06-17 |
| 6802986 | Low-aberration deflectors for use in charged-particle-beam optical systems, and methods for fabricating such deflectors | — | 2004-10-12 |
| 6635891 | Hollow-beam apertures for charged-particle-beam microlithography apparatus and methods for making and using same | Junji Nakamura | 2003-10-21 |
| 6566663 | Charged-particle-beam optical components and systems including ferrite exhibiting reduced image displacement from temperature fluctuations | Koichi Kamijo, Shinichi Kojima, Kazuya Okamoto | 2003-05-20 |