Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10846457 | Lithography system, simulation apparatus, and pattern forming method | Tomoyuki Matsuyama, Shintaro Kudo | 2020-11-24 |
| 10338480 | Lithography system, simulation apparatus, and pattern forming method | Tomoyuki Matsuyama, Shintaro Kudo | 2019-07-02 |
| 9846371 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2017-12-19 |
| 9798245 | Exposure apparatus, and exposure method, with recovery device to recover liquid leaked from between substrate and member | Yasufumi Nishii, Kenichi Shiraishi | 2017-10-24 |
| 9746781 | Exposure apparatus and method for producing device | Takeshi Okuyama, Hiroyuki Nagasaka, Katsushi Nakano | 2017-08-29 |
| 9599907 | Exposure apparatus and device manufacturing method | Hiroyuki Nagasaka, Yasufumi Nishii | 2017-03-21 |
| 9268237 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2016-02-23 |
| 9019467 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2015-04-28 |
| 8488099 | Exposure apparatus and device manufacturing method | Hiroyuki Nagasaka, Yasufumi Nishii | 2013-07-16 |
| 8384880 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2013-02-26 |
| 8208117 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2012-06-26 |
| 7982857 | Stage apparatus, exposure apparatus, and exposure method with recovery device having lyophilic portion | Yasufumi Nishii, Kenichi Shiraishi | 2011-07-19 |