Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846371 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2017-12-19 |
| 9798245 | Exposure apparatus, and exposure method, with recovery device to recover liquid leaked from between substrate and member | Kenichi Shiraishi, Hirotaka Kohno | 2017-10-24 |
| 9766555 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka | 2017-09-19 |
| 9599907 | Exposure apparatus and device manufacturing method | Hiroyuki Nagasaka, Hirotaka Kohno | 2017-03-21 |
| 9268237 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2016-02-23 |
| 9182684 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka | 2015-11-10 |
| 9019467 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2015-04-28 |
| 9013675 | Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method | Hiroyuki Nagasaka, Takeshi Okuyama | 2015-04-21 |
| 8891055 | Maintenance method, maintenance device, exposure apparatus, and device manufacturing method | Tomoharu Fujiwara, Kenichi Shiraishi | 2014-11-18 |
| 8736809 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Soichi Owa | 2014-05-27 |
| 8488099 | Exposure apparatus and device manufacturing method | Hiroyuki Nagasaka, Hirotaka Kohno | 2013-07-16 |
| 8477283 | Exposure apparatus and device manufacturing method | — | 2013-07-02 |
| 8456608 | Maintenance method, maintenance device, exposure apparatus, and device manufacturing method | Tomoharu Fujiwara, Kenichi Shiraishi | 2013-06-04 |
| 8384880 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2013-02-26 |
| 8300207 | Exposure apparatus, immersion system, exposing method, and device fabricating method | — | 2012-10-30 |
| 8233139 | Immersion system, exposure apparatus, exposing method, and device fabricating method | — | 2012-07-31 |
| 8208117 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2012-06-26 |
| 8134685 | Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method | Hiroyuki Nagasaka, Takeshi Okuyama | 2012-03-13 |
| 8035800 | Exposure apparatus, maintenance method, exposure method, and method for producing device | — | 2011-10-11 |
| 7982857 | Stage apparatus, exposure apparatus, and exposure method with recovery device having lyophilic portion | Kenichi Shiraishi, Hirotaka Kohno | 2011-07-19 |
| 7804576 | Maintenance method, maintenance device, exposure apparatus, and device manufacturing method | Tomoharu Fujiwara, Kenichi Shiraishi | 2010-09-28 |