Issued Patents All Time
Showing 1–25 of 74 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11401450 | Fluid synthesis system | Takashi Nagata, Ting-Chien Teng, Bausan Yuan | 2022-08-02 |
| 10461039 | Mark, method for forming same, and exposure apparatus | Yuji Shiba, Tomoharu Fujiwara | 2019-10-29 |
| 10236259 | Mark, method for forming same, and exposure apparatus | Yuji Shiba, Tomoharu Fujiwara | 2019-03-19 |
| 10185232 | Exposure apparatus, method for producing device, and method for controlling exposure apparatus | Naoyuki Kobayashi | 2019-01-22 |
| 9941217 | Mark, method for forming same, and exposure apparatus | Yuji Shiba, Tomoharu Fujiwara | 2018-04-10 |
| 9846371 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue, Hirotaka Kohno +6 more | 2017-12-19 |
| 9760026 | Exposure apparatus, method for producing device, and method for controlling exposure apparatus | Naoyuki Kobayashi | 2017-09-12 |
| 9494871 | Exposure apparatus, method for producing device, and method for controlling exposure apparatus | Naoyuki Kobayashi | 2016-11-15 |
| 9268237 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue, Hirotaka Kohno +6 more | 2016-02-23 |
| 9019467 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue, Hirotaka Kohno +6 more | 2015-04-28 |
| 8749757 | Exposure apparatus, method for producing device, and method for controlling exposure apparatus | Naoyuki Kobayashi, Yasuyuki Sakakibara, Hiroaki Takaiwa, Hisatsune Kadota | 2014-06-10 |
| 8451424 | Exposure apparatus, method for producing device, and method for controlling exposure apparatus | Naoyuki Kobayashi, Yasuyuki Sakakibara, Hiroaki Takaiwa, Hisatsune Kadota | 2013-05-28 |
| 8384880 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue, Hirotaka Kohno +6 more | 2013-02-26 |
| 8208117 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue, Hirotaka Kohno +6 more | 2012-06-26 |
| 8040491 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Shigeru Hirukawa, Yoshihiko Kudo | 2011-10-18 |
| 8034539 | Exposure apparatus and method for producing device | Hiroaki Takaiwa, Dai Arai | 2011-10-11 |
| 7911582 | Exposure apparatus and device manufacturing method | Shigeru Hirukawa, Issey Tanaka | 2011-03-22 |
| 7515246 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka | 2009-04-07 |
| 7505115 | Exposure apparatus, method for producing device, and method for controlling exposure apparatus | Naoyuki Kobayashi | 2009-03-17 |
| 7483119 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue, Hiroyuki Nagasaka | 2009-01-27 |
| 7466392 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka | 2008-12-16 |
| 7460207 | Exposure apparatus and method for producing device | Hideo Mizutani | 2008-12-02 |
| 7436487 | Exposure apparatus and method for producing device | Hideo Mizutani | 2008-10-14 |
| 7379158 | Exposure apparatus and method for producing device | Hideo Mizutani | 2008-05-27 |
| 6876946 | Alignment method and apparatus therefor | Masahiko Yasuda, Osamu Furukawa, Masaharu Kawakubo, Hiroki Tateno | 2005-04-05 |