Issued Patents All Time
Showing 51–74 of 74 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5734478 | Projection exposure apparatus | Hideo Mizutani, Kenji Nishi | 1998-03-31 |
| 5689339 | Alignment apparatus | Kazuya Ota, Kouichirou Komatsu, Hideo Mizutani | 1997-11-18 |
| 5587794 | Surface position detection apparatus | Hideo Mizutani, Naoyuki Kobayashi | 1996-12-24 |
| 5576829 | Method and apparatus for inspecting a phase-shifted mask | Naomasa Shiraishi | 1996-11-19 |
| 5528390 | Exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniques | Akihiro Goto, Takashi Genma, Yutaka Ichihara, Naomasa Shiraishi, Toshio Matsuura +2 more | 1996-06-18 |
| 5521036 | Positioning method and apparatus | Yoshichika Iwamoto, Hiroki Tateno, Hiroki Okamoto | 1996-05-28 |
| 5504596 | Exposure method and apparatus using holographic techniques | Akihiro Goto, Takashi Gemma, Yutaka Ichihara, Naomasa Shiraishi, Hiroshi Shirasu +1 more | 1996-04-02 |
| 5489986 | Position detecting apparatus | Kazuya Ota, Hideo Mizutani, Kouichiro Komatsu | 1996-02-06 |
| 5483311 | Projection exposure apparatus | Yasuyuki Sakakibara, Susumu Makinouchi, Naomasa Shiraishi | 1996-01-09 |
| 5402224 | Distortion inspecting method for projection optical system | Shigeru Hirukawa, Kyoichi Suwa | 1995-03-28 |
| 5355223 | Apparatus for detecting a surface position | — | 1994-10-11 |
| 5347356 | Substrate aligning device using interference light generated by two beams irradiating diffraction grating | Kazuya Ota, Hideo Mizutani, Kouichiro Komatsu | 1994-09-13 |
| 5343270 | Projection exposure apparatus | Yasuyuki Sakakibara, Susumu Makinouchi, Naomasa Shiraishi | 1994-08-30 |
| 5289231 | Apparatus for manufacturing disc medium | Hiromitsu Iwata, Junichi Morino, Toru Kiuchi | 1994-02-22 |
| 5171999 | Adjustable beam and interference fringe position | Koichiro Komatsu, Hideo Mizutani, Kazuya Ota | 1992-12-15 |
| 5160849 | Diffraction-type displacement detector for alignment of mask and wafer | Kazuya Ota | 1992-11-03 |
| 5151750 | Alignment apparatus | Kazuya Ota, Hideo Mizutani, Kouichiro Komatsu | 1992-09-29 |
| RE34010 | Position detection apparatus | Yutaka Ichihara | 1992-07-28 |
| 5118953 | Substrate alignment apparatus using diffracted and reflected radiation beams | Kazuya Ota, Hideo Mizutani, Kouichiro Komatsu | 1992-06-02 |
| 5070250 | Position detection apparatus with adjustable beam and interference fringe positions | Koichiro Komatsu, Hideo Mizutani, Kazuya Ota | 1991-12-03 |
| 5004348 | Alignment device | — | 1991-04-02 |
| 4739373 | Projection exposure apparatus | Kenji Nishi | 1988-04-19 |
| 4710026 | Position detection apparatus | Yutaka Ichihara | 1987-12-01 |
| 4632531 | Focusing screen | Yutaka Ichihara, Yutaka Iizuka, Shuji Kunimatsu, Tomonari Inaba | 1986-12-30 |