Issued Patents All Time
Showing 1–25 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11945917 | Composition, film, color filter, solid-state imaging element, image display device, and method for producing compound | Yutaro Fukami, Yushi Kaneko, Junichi Ito, Hiromu Koizumi | 2024-04-02 |
| 11746239 | Coloring composition, film, color filter, solid-state imaging element, and image display device | Shoichi Nakamura, Haruki Inabe | 2023-09-05 |
| 11718695 | Curable composition, cured product, color filter, method for producing color filter, solid imaging element, and image display device | Junichi Ito, Yutaro Fukami, Yushi Kaneko, Hiromu Koizumi, Michihiro Ogawa +1 more | 2023-08-08 |
| 10234766 | Mask protection device, exposure apparatus, and method for manufacturing device | — | 2019-03-19 |
| 10113948 | Particle detection method, particle detection device and particle detection system | Takanori Ichiki, Kuno SUZUKI, Daishi Tanaka, Jiro Inoue | 2018-10-30 |
| 9715175 | Mask protection device, exposure apparatus, and method for manufacturing device | — | 2017-07-25 |
| 7211543 | Photocatalyst composition | Akira Nakabayashi | 2007-05-01 |
| 7177008 | Exposure apparatus and method | Kenji Nishi | 2007-02-13 |
| 6813002 | Exposure method and apparatus, method of making exposure apparatus, device and device manufacturing method | — | 2004-11-02 |
| 6798491 | Exposure apparatus and an exposure method | Kenji Nishi | 2004-09-28 |
| 6727980 | Apparatus and method for pattern exposure and method for adjusting the apparatus | Akikazu Tanimoto, Tsuneyuki Hagiwara, Hideki Komatsuda, Takashi Mori | 2004-04-27 |
| 6699630 | Method and apparatus for exposure, and device manufacturing method | — | 2004-03-02 |
| 6645701 | Exposure method and exposure apparatus | Shin Takagi | 2003-11-11 |
| 6641962 | Micro devices manufacturing method utilizing concave and convex alignment mark patterns | Shinji Mizutani, Masahiko Yasuda | 2003-11-04 |
| 6594334 | Exposure method and exposure apparatus | — | 2003-07-15 |
| 6590634 | Exposure apparatus and method | Kenji Nishi | 2003-07-08 |
| 6566022 | Micro devices manufacturing method and apparatus therefor | Shinji Mizutani, Masahiko Yasuda | 2003-05-20 |
| 6549270 | Exposure apparatus, exposure method and method for manufacturing devices | — | 2003-04-15 |
| 6549269 | Exposure apparatus and an exposure method | Kenji Nishi | 2003-04-15 |
| 6535272 | Position transducer and exposure apparatus with same | Jiro Inoue | 2003-03-18 |
| 6485153 | Exposure apparatus and method | — | 2002-11-26 |
| 6483569 | Exposure method and exposure apparatus | — | 2002-11-19 |
| 6406820 | Exposure method for a projection optical system | — | 2002-06-18 |
| 6400441 | Projection exposure apparatus and method | Kenji Nishi | 2002-06-04 |
| 6388735 | Projection exposure system | — | 2002-05-14 |