Issued Patents All Time
Showing 25 most recent of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11928794 | Image processing device, image processing program, image processing method, and imaging device | — | 2024-03-12 |
| 10025194 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Yasushi Mizuno +3 more | 2018-07-17 |
| 9513558 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Yasushi Mizuno +3 more | 2016-12-06 |
| 8749759 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Yasushi Mizuno +3 more | 2014-06-10 |
| 8305553 | Exposure apparatus and device manufacturing method | Katsushi Nakano | 2012-11-06 |
| 8139198 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Yasushi Mizuno +3 more | 2012-03-20 |
| 7965387 | Image plane measurement method, exposure method, device manufacturing method, and exposure apparatus | — | 2011-06-21 |
| 7791718 | Measurement method, exposure method, and device manufacturing method | — | 2010-09-07 |
| 7566893 | Best focus detection method, exposure method, and exposure apparatus | Naota Konda | 2009-07-28 |
| 7474386 | Wafer flatness evaluation method, wafer flatness evaluation apparatus carrying out the evaluation method, wafer manufacturing method using the evaluation method, wafer quality assurance method using the evaluation method, semiconductor device manufacturing method using the evaluation method and semiconductor device manufacturing method using a wafer evaluated by the evaluation method | Tadahito Fujisawa, Soichi Inoue, Makoto Kobayashi, Masashi Ichikawa, Kenichi Kodama | 2009-01-06 |
| 7365830 | Wafer flatness evaluation method, wafer flatness evaluation apparatus carrying out the evaluation method, wafer manufacturing method using the evaluation method, wafer quality assurance method using the evaluation method, semiconductor device manufacturing method using the evaluation method and semiconductor device manufacturing method using a wafer evaluated by the evaluation method | Tadahito Fujisawa, Soichi Inoue, Makoto Kobayashi, Masashi Ichikawa, Kenichi Kodama | 2008-04-29 |
| 7351504 | Photomask blank substrate, photomask blank and photomask | Masayuki Nakatsu, Tsuneo Numanami, Masayuki Mogi, Masamitsu Itoh, Naoto Kondo | 2008-04-01 |
| 7344808 | Method of making photomask blank substrates | Tsuneo Numanami, Masayuki Nakatsu, Masayuki Mogi, Naoto Kondo | 2008-03-18 |
| 7329475 | Method of selecting photomask blank substrates | Masayuki Nakatsu, Tsuneo Numanami, Masayuki Mogi, Masamitsu Itoh, Naoto Kondo | 2008-02-12 |
| 7230680 | Wafer flatness evaluation method, wafer flatness evaluation apparatus carrying out the evaluation method, wafer manufacturing method using the evaluation method, wafer quality assurance method using the evaluation method, semiconductor device manufacturing method using the evaluation method and semiconductor device manufacturing method using a wafer evaluated by the evaluation method | Tadahito Fujisawa, Soichi Inoue, Makoto Kobayashi, Masashi Ichikawa, Kenichi Kodama | 2007-06-12 |
| 7081946 | Holding apparatus, holding method, exposure apparatus and device manufacturing method | Hiromitsu Yoshimoto, Hiroto Horikawa, Hideo Mizutani | 2006-07-25 |
| 7070888 | Method of selecting photomask blank substrates | Masayuki Nakatsu, Tsuneo Numanami, Masayuki Mogi, Naoto Kondo | 2006-07-04 |
| 6992751 | Scanning exposure apparatus | Shinichi Okita | 2006-01-31 |
| 6727980 | Apparatus and method for pattern exposure and method for adjusting the apparatus | Kazuya Ota, Akikazu Tanimoto, Hideki Komatsuda, Takashi Mori | 2004-04-27 |
| 6538721 | Scanning exposure apparatus | Shinichi Okita | 2003-03-25 |
| 6381004 | Exposure apparatus and device manufacturing method | Hideyuki Tashiro | 2002-04-30 |
| 5907396 | Optical detection system for detecting defects and/or particles on a substrate | Koichiro Komatsu, Hideyuki Tashiro | 1999-05-25 |
| 5838433 | Apparatus for detecting defects on a mask | — | 1998-11-17 |
| 5798831 | Defect inspecting apparatus and defect inspecting method | — | 1998-08-25 |
| 5790251 | Defect inspecting apparatus | — | 1998-08-04 |