Issued Patents All Time
Showing 1–25 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342206 | Substrate case and substrate accommodation apparatus | Tohru Kiuchi, Toru Kawaguchi, Takashi MASUKAWA | 2022-05-24 |
| 10541160 | Substrate case and substrate accommodation apparatus | Tohru Kiuchi, Toru Kawaguchi, Takashi MASUKAWA | 2020-01-21 |
| 9152062 | Pattern forming device, pattern forming method, and device manufacturing method | Tohru Kiuchi | 2015-10-06 |
| 9113562 | Manufacturing method for printed wiring board | Toshiyuki Matsui, Atsushi Deguchi | 2015-08-18 |
| 8399263 | Method for measuring expansion/contraction, method for processing substrate, method for producing device, apparatus for measuring expansion/contraction, and apparatus for processing substrate | Tohru Kiuchi | 2013-03-19 |
| 8379186 | Pattern formation apparatus, pattern formation method, and device manufacturing method | Tohru Kiuchi | 2013-02-19 |
| 8264666 | Exposure apparatus, exposure method, and method of manufacturing device | Tohru Kiuchi | 2012-09-11 |
| 8235695 | Pattern forming device, pattern forming method, and device manufacturing method | Tohru Kiuchi | 2012-08-07 |
| 8161637 | Manufacturing method for printed wiring board | Toshiyuki Matsui, Atsushi Deguchi | 2012-04-24 |
| 7460207 | Exposure apparatus and method for producing device | Nobutaka Magome | 2008-12-02 |
| 7436487 | Exposure apparatus and method for producing device | Nobutaka Magome | 2008-10-14 |
| 7379158 | Exposure apparatus and method for producing device | Nobutaka Magome | 2008-05-27 |
| 7081946 | Holding apparatus, holding method, exposure apparatus and device manufacturing method | Tsuneyuki Hagiwara, Hiromitsu Yoshimoto, Hiroto Horikawa | 2006-07-25 |
| 6894763 | Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the same | Seiro Murakami, Takaharu Miura, Akikazu Tanimoto, Yutaka Ichihara | 2005-05-17 |
| 6321583 | Multifunction rolling mill for H-beam and rolling method of rolling H-beam with multifunction rolling mill | Toru Ikezaki, Takashi Suzuki, Takashi Haji | 2001-11-27 |
| 6320658 | Apparatus and method for detecting the position of a surface to be examined, exposure apparatus equipped with the detecting apparatus and method of producing the exposure apparatus, and method of producing devices using the exposure apparatus | — | 2001-11-20 |
| 6304319 | Exposure apparatus, method of producing the same, and method of producing devices | — | 2001-10-16 |
| 6230176 | Fast fourier transform processing device, fast fourier transform processing system, and fast fourier transform processing method | — | 2001-05-08 |
| 6153886 | Alignment apparatus in projection exposure apparatus | Shigeru Hagiwara, Kazuya Ota | 2000-11-28 |
| 6124933 | Exposure apparatus utilizing surface position detection, method thereof, and semiconductor device production method using the apparatus | Naoyuki Kobayashi, Nobutaka Magome | 2000-09-26 |
| RE36740 | Cata-dioptric reduction projection optical system | Yutaka Ichihara, Sumio Hashimoto, Yutaka Suenaga | 2000-06-20 |
| 5995198 | Exposure apparatus | — | 1999-11-30 |
| 5805347 | Variable-magnification telecentric optical system | Hiroshi Nishimura, Masashi Tanaka | 1998-09-08 |
| 5801835 | Surface position detection apparatus and method | Naoyuki Kobayashi, Nobutaka Magome | 1998-09-01 |
| 5796114 | Exposure apparatus and method for positioning with a high accuracy | — | 1998-08-18 |