Issued Patents All Time
Showing 26–50 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5757505 | Exposure apparatus | — | 1998-05-26 |
| 5751403 | Projection exposure apparatus and method | Tohru Kawaguchi | 1998-05-12 |
| 5734478 | Projection exposure apparatus | Nobutaka Magome, Kenji Nishi | 1998-03-31 |
| 5689339 | Alignment apparatus | Kazuya Ota, Kouichirou Komatsu, Nobutaka Magome | 1997-11-18 |
| 5684595 | Alignment apparatus and exposure apparatus equipped therewith | Masaki Kato, Masashi Tanaka | 1997-11-04 |
| 5633721 | Surface position detection apparatus | — | 1997-05-27 |
| 5602399 | Surface position detecting apparatus and method | — | 1997-02-11 |
| 5587794 | Surface position detection apparatus | Naoyuki Kobayashi, Nobutaka Magome | 1996-12-24 |
| 5583609 | Projection exposure apparatus | Tohru Kiuchi | 1996-12-10 |
| 5572288 | Exposure apparatus with variable alignment optical system | — | 1996-11-05 |
| 5569929 | Double-beam light source apparatus, position detecting apparatus and aligning apparatus | Kazuya Ota | 1996-10-29 |
| 5568257 | Adjusting device for an alignment apparatus | Kazuya Ota, Kouichiro Komatsu | 1996-10-22 |
| 5530256 | Double-beam light source apparatus, position detecting apparatus and aligning apparatus | Kazuya Ota | 1996-06-25 |
| 5530257 | Double-beam light source apparatus, position detecting apparatus and aligning apparatus | Kazuya Ota | 1996-06-25 |
| 5528027 | Scanning exposure apparatus having a scanning device for scanning light beams along the movement direction of a moving mask stage | — | 1996-06-18 |
| 5510892 | Inclination detecting apparatus and method | Kesayoshi Amano, Shinji Wakamoto, Yuji Imai | 1996-04-23 |
| 5489986 | Position detecting apparatus | Nobutaka Magome, Kazuya Ota, Kouichiro Komatsu | 1996-02-06 |
| 5488230 | Double-beam light source apparatus, position detecting apparatus and aligning apparatus | Kazuya Ota | 1996-01-30 |
| 5416562 | Method of detecting a position and apparatus therefor | Kazuya Ota | 1995-05-16 |
| 5347356 | Substrate aligning device using interference light generated by two beams irradiating diffraction grating | Kazuya Ota, Nobutaka Magome, Kouichiro Komatsu | 1994-09-13 |
| 5251070 | Catadioptric reduction projection optical system | Sumio Hashimoto, Yutaka Ichihara | 1993-10-05 |
| 5241188 | Apparatus for detecting a focussing position | — | 1993-08-31 |
| 5220454 | Cata-dioptric reduction projection optical system | Yutaka Ichihara, Sumio Hashimoto, Yutaka Suenaga | 1993-06-15 |
| 5216628 | Absolute value arithmetic circuit | Noritsugu Matsubishi, Yoshio Tokuno | 1993-06-01 |
| 5214489 | Aligning device for exposure apparatus | Kenji Nishi | 1993-05-25 |