Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8351116 | Optical component and phase contrast microscope using optical component | — | 2013-01-08 |
| 7079314 | Catadioptric optical system and exposure apparatus equipped with the same | Tomohiro Miyashita, Kotaro Yamaguchi | 2006-07-18 |
| 6856377 | Relay image optical system, and illuminating optical device and exposure system provided with the optical system | — | 2005-02-15 |
| 6844919 | Projection optical system and exposure apparatus having the projection optical system | — | 2005-01-18 |
| 6707601 | Exposure apparatus and method | Yasuhiro Omura | 2004-03-16 |
| RE38403 | Projection optical system and projection exposure apparatus | Toshihiro Sasaya, Kazuo Ushida, Romeo I. Mercado | 2004-01-27 |
| 6646797 | Exposure apparatus and method | Yasuhiro Omura | 2003-11-11 |
| 6633365 | Projection optical system and exposure apparatus having the projection optical system | — | 2003-10-14 |
| 6452723 | Exposure apparatus and method | Yasuhiro Omura | 2002-09-17 |
| 6451507 | Exposure apparatus and method | Yasuhiro Omura | 2002-09-17 |
| RE37846 | Projection optical system and exposure apparatus using the same | Hitoshi Matsuzawa, Misako Kobayashi, Kazumasa Endo | 2002-09-17 |
| 6377338 | Exposure apparatus and method | — | 2002-04-23 |
| 6302548 | Catoptric reduction projection optical system and exposure apparatus and method using same | Tomowaki Takahashi | 2001-10-16 |
| 6259557 | Device and method for dark field illumination | Tomohiro Miyashita | 2001-07-10 |
| 6213610 | Catoptric reduction projection optical system and exposure apparatus and method using same | Tomowaki Takahashi | 2001-04-10 |
| 6118596 | Catadioptric reduction projection optical system and method | Sumio Hashimoto, Yutaka Ichihara | 2000-09-12 |
| 6108140 | Catadioptric reduction projection optical system and method | Sumio Hashimoto, Yutaka Ichihara | 2000-08-22 |
| 6084723 | Exposure apparatus | Hitoshi Matsuzawa, Koji Shigematsu, Kazumasa Endo | 2000-07-04 |
| RE36740 | Cata-dioptric reduction projection optical system | Yutaka Ichihara, Hideo Mizutani, Sumio Hashimoto | 2000-06-20 |
| 5978155 | Adapters for correcting spherical aberrations of objective lens | — | 1999-11-02 |
| 5943172 | Projection optical system and projection exposure apparatus | Toshihiro Sasaya, Kazuo Ushida, Romeo I. Mercado | 1999-08-24 |
| 5940220 | Microscope objective lens with variable correction of aberrations imparted by transparent body between the specimen and the objective lens | Masayuki Mizusawa | 1999-08-17 |
| 5930049 | Projection optical system and method of using such system for manufacturing devices | Kotaro Yamaguchi | 1999-07-27 |
| 5920432 | Microscope objective lens | Katsuya Watanabe | 1999-07-06 |
| 5889617 | Objective lens systems | Hiroshi Yamada, Itoe Ito | 1999-03-30 |