Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8730465 | Polarized light defect detection in pupil images | Daisaku Mochida, Toru Yoshikawa, Hiromasa Shibata, Akitoshi Kawai | 2014-05-20 |
| 8705840 | Defect inspection device and defect inspection method | — | 2014-04-22 |
| 7166163 | Optical member, method of manufacturing the same, and projection exposure system | Hideki Obara | 2007-01-23 |
| 6958803 | Projection exposure apparatus and method with adjustment of rotationally asymmetric optical characteristics | Toshihiro Sasaya, Kazuo Ushida | 2005-10-25 |
| 6850371 | Optical member and method of producing the same, and projection aligner | Hideki Obara | 2005-02-01 |
| 6829039 | Optical member for photolithography and method of evaluating the same | Hiroyuki Hiraiwa, Kazuhiro Nakagawa, Masaaki Mochida | 2004-12-07 |
| RE37846 | Projection optical system and exposure apparatus using the same | Hitoshi Matsuzawa, Misako Kobayashi, Yutaka Suenaga | 2002-09-17 |
| 6262793 | Method of manufacturing and using correction member to correct aberration in projection exposure apparatus | Toshihiro Sasaya, Kazuo Ushida | 2001-07-17 |
| 6084723 | Exposure apparatus | Hitoshi Matsuzawa, Koji Shigematsu, Yutaka Suenaga | 2000-07-04 |
| 5903400 | Projection-optical system for use in a projection-exposure apparatus | — | 1999-05-11 |
| 5835285 | Projection optical system and exposure apparatus using the same | Hitoshi Matsuzawa, Misako Kobayashi, Yutaka Suenaga | 1998-11-10 |
| 4758864 | Projection exposure apparatus | Yasuhisa Matsumoto | 1988-07-19 |
| 4723846 | Optical path length compensating optical system in an alignment apparatus | Makoto Uehara, Susumu Mori, Shuhei Takagi, Yukio Kakizaki | 1988-02-09 |
| 4660966 | Optical alignment apparatus | Kinya Kato | 1987-04-28 |