Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7097488 | Socket for electrical parts | Kenji Hayakawa | 2006-08-29 |
| 6994747 | Method for producing optical member | Shigeru Sakuma, Minako Azumi, Masaaki Mochida | 2006-02-07 |
| 6829039 | Optical member for photolithography and method of evaluating the same | Kazumasa Endo, Kazuhiro Nakagawa, Masaaki Mochida | 2004-12-07 |
| 6769273 | Method of manufacturing silica glass member and silica glass member obtained by the method | Kazuhiro Nakagawa | 2004-08-03 |
| 6732546 | Product method of synthetic silica glass and thermal treatment apparatus | Shouji Yajima, Yasuji Ishida | 2004-05-11 |
| 6672109 | Silica glass member, method for producing the same, and projection aligners using the same | — | 2004-01-06 |
| 6583931 | Projection optical system, production method thereof, and projection exposure apparatus using it | Issey Tanaka | 2003-06-24 |
| 6518210 | Exposure apparatus including silica glass and method for producing silica glass | Hiroki Jinbo, Norio Komine | 2003-02-11 |
| 6366404 | Projection optical system, production method thereof, and projection exposure apparatus using it | Issey Tanaka | 2002-04-02 |
| 6229904 | Automatic morphing photography booth | Sming Huang | 2001-05-08 |
| 6189339 | Method for producing silica glass used for photolithography | — | 2001-02-20 |
| 6181469 | Optical member for photolithography, method for evaluating optical member, and photolithography apparatus | Issey Tanaka, Katsuya Miyoshi | 2001-01-30 |
| 6129987 | Method of making a piece of glass for measuring transmittance | Hiroki Jinbo, Satoru Oshikawa | 2000-10-10 |
| 6116260 | Liquid material supplying apparatus and liquid material supplying method | Kazuhiro Nakagawa | 2000-09-12 |
| 6108126 | Illuminating apparatus | Shigeru Hagiwara, Takashi Mori | 2000-08-22 |
| 6087283 | Silica glass for photolithography | Hiroki Jinbo, Norio Komine | 2000-07-11 |
| 6025955 | Optical member for photolithography, method for evaluating optical member, and photolithography apparatus | Issey Tanaka, Katsuya Miyoshi | 2000-02-15 |
| 5958809 | Fluorine-containing silica glass | Seishi Fujiwara, Kazuhiro Nakagawa, Shouji Yajima, Norio Komine, Hiroki Jinbo | 1999-09-28 |
| 5908482 | Method for producing a silica glass | Norio Komine | 1999-06-01 |
| 5897220 | Automatic photograph booth for forming sketches | Sming Huang | 1999-04-27 |
| 5776219 | Method of making a piece of glass for measuring transmittance | Hiroki Jinbo, Satoru Oshikawa | 1998-07-07 |
| 5719698 | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production | Issey Tanaka | 1998-02-17 |
| 5707908 | Silica glass | Norio Komine | 1998-01-13 |
| 5703712 | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production | Norio Komine, Hiroki Jinbo, Seishi Fujiwara | 1997-12-30 |
| 5702495 | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production | Kazuhiro Nakagawa, Hiroki Jinbo, Jun Takano, Seishi Fujiwara | 1997-12-30 |