Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7515248 | Illumination optical system, exposure apparatus, and exposure method with polarized state detection result and adjustment | Osamu Tanitsu, Hirohisa Tanaka, Kenichi Muramatsu, Hisashi Nishinaga, Tomoyuki Matsuyama +1 more | 2009-04-07 |
| 7515247 | Illumination optical system, exposure apparatus, and exposure method with polarized state fluctuation correcting device | Osamu Tanitsu, Hirohisa Tanaka, Kenichi Muramatsu, Hisashi Nishinaga, Tomoyuki Matsuyama +1 more | 2009-04-07 |
| 7423731 | Illumination optical system, exposure apparatus, and exposure method with polarized switching device | Osamu Tanitsu, Hirohisa Tanaka, Kenichi Muramatsu, Hisashi Nishinaga, Tomoyuki Matsuyama +1 more | 2008-09-09 |
| 7072026 | Exposure apparatus and optical component for the same | Masafumi Mizuguchi | 2006-07-04 |
| 6835683 | Quartz glass member and projection aligner | Akiko Yoshida, Hiroki Jinbo, Seishi Fujiwara | 2004-12-28 |
| 6656860 | Synthetic silica glass member, photolithography apparatus and process for producing photolithography apparatus | Akiko Yoshida, Hiroki Jinbo | 2003-12-02 |
| 6649268 | Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member | Seishi Fujiwara, Akiko Yoshida, Hiroki Jinbo, Norihisa Yamaguchi | 2003-11-18 |
| 6587262 | UV synthetic silica glass optical member and reduction projection exposure apparatus using the same | Seishi Fujiwara, Hiroki Jinbo | 2003-07-01 |
| 6518210 | Exposure apparatus including silica glass and method for producing silica glass | Hiroki Jinbo, Hiroyuki Hiraiwa | 2003-02-11 |
| 6505484 | Forming method of silica glass and forming apparatus thereof | Seishi Fujiwara, Hiroki Jinbo | 2003-01-14 |
| 6442973 | Synthetic silica glass and its manufacturing method | Seishi Fujiwara, Akiko Yoshida, Hiroki Jinbo | 2002-09-03 |
| 6378340 | Manufacturing method of synthetic silica glass | Seishi Fujiwara, Hiroki Jinbo | 2002-04-30 |
| 6374639 | Silica glass and its manufacturing method | Seishi Fujiwara, Hiroki Jinbo | 2002-04-23 |
| 6339033 | Silica glass having superior durability against excimer laser beams and method for manufacturing the same | Hiroki Jinbo, Seishi Fujiwara, Akiko Yoshida | 2002-01-15 |
| 6320661 | Method for measuring transmittance of optical members for ultraviolent use, synthetic silica glass, and photolithography apparatus using the same | Akiko Yoshida, Hiroki Jinbo | 2001-11-20 |
| 6291377 | Silica glass and its manufacturing method | Seishi Fujiwara, Hiroki Jinbo | 2001-09-18 |
| 6269661 | Method for manufacturing optical components for use in the ultraviolet region | Hiroki Jinbo, Akiko Moriya | 2001-08-07 |
| 6174830 | Silica glass having superior durability against excimer laser beams and method for manufacturing the same | Hiroki Jinbo, Seishi Fujiwara, Akiko Yoshida | 2001-01-16 |
| 6094940 | Manufacturing method of synthetic silica glass | Seishi Fujiwara, Hiroki Jinbo, Toshitsugu Suwa | 2000-08-01 |
| 6087283 | Silica glass for photolithography | Hiroki Jinbo, Hiroyuki Hiraiwa | 2000-07-11 |
| 6075607 | Method for estimating durability of optical member against excimer laser irradiation and method for selecting silica glass optical member | Hiroki Jinbo, Seishi Fujiwara | 2000-06-13 |
| 6061174 | Image-focusing optical system for ultraviolet laser | Masaki Shiozawa, Tsutomu Mizugaki, Shigeru Sakuma, Seishi Fujiwara, Hiroki Jinbo | 2000-05-09 |
| 5983672 | Method for manufacturing optical components for use in the ultraviolet region | Hiroki Jinbo, Akiko Moriya | 1999-11-16 |
| 5958809 | Fluorine-containing silica glass | Seishi Fujiwara, Hiroyuki Hiraiwa, Kazuhiro Nakagawa, Shouji Yajima, Hiroki Jinbo | 1999-09-28 |
| 5908482 | Method for producing a silica glass | Hiroyuki Hiraiwa | 1999-06-01 |