Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8724076 | Projection exposure apparatus, cleaning and maintenance methods of a projection exposure apparatus, and device manufacturing method | Yasuhisa Tani | 2014-05-13 |
| 7940309 | Optical low pass filter and image-capturing device | Tatsushi Nomura | 2011-05-10 |
| 6377332 | Optical member for photolithography and photolithography apparatus | Shigeru Sakuma | 2002-04-23 |
| 6320700 | Light-transmitting optical member, manufacturing method thereof, evaluation method therefor, and optical lithography apparatus using the optical member | — | 2001-11-20 |
| 6226128 | Light-transmitting optical member, manufacturing method thereof, evaluation method therefor, and optical lithography apparatus using the optical member | — | 2001-05-01 |
| 6061174 | Image-focusing optical system for ultraviolet laser | Tsutomu Mizugaki, Shigeru Sakuma, Norio Komine, Seishi Fujiwara, Hiroki Jinbo | 2000-05-09 |
| 5978070 | Projection exposure apparatus | Shigeru Sakuma, Tsutomu Mizugaki | 1999-11-02 |