Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8724076 | Projection exposure apparatus, cleaning and maintenance methods of a projection exposure apparatus, and device manufacturing method | Masaki Shiozawa | 2014-05-13 |
| 8035797 | Projection exposure apparatus, cleaning and maintenance methods of a projection exposure apparatus, and device manufacturing method | — | 2011-10-11 |