Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9580331 | CaF2 polycrystalline body, focus ring, plasma processing apparatus, and method for producing CaF2 polycrystalline body | Naoyasu Uehara, Yuka Narukawa | 2017-02-28 |
| 6835683 | Quartz glass member and projection aligner | Norio Komine, Akiko Yoshida, Hiroki Jinbo | 2004-12-28 |
| 6649268 | Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member | Norio Komine, Akiko Yoshida, Hiroki Jinbo, Norihisa Yamaguchi | 2003-11-18 |
| 6587181 | Optical system with improved durability for projection exposure apparatus and method for manufacturing optical system for projection exposure apparatus | Hiroki Jinbo | 2003-07-01 |
| 6587262 | UV synthetic silica glass optical member and reduction projection exposure apparatus using the same | Norio Komine, Hiroki Jinbo | 2003-07-01 |
| 6505484 | Forming method of silica glass and forming apparatus thereof | Norio Komine, Hiroki Jinbo | 2003-01-14 |
| 6473226 | Silica glass member | Hiroki Jinbo | 2002-10-29 |
| 6442973 | Synthetic silica glass and its manufacturing method | Norio Komine, Akiko Yoshida, Hiroki Jinbo | 2002-09-03 |
| 6378340 | Manufacturing method of synthetic silica glass | Norio Komine, Hiroki Jinbo | 2002-04-30 |
| 6374639 | Silica glass and its manufacturing method | Norio Komine, Hiroki Jinbo | 2002-04-23 |
| 6373554 | Optical system with improved durability for projection exposure apparatus and method for manufacturing optical system for projection exposure apparatus | Hiroki Jinbo | 2002-04-16 |
| 6339033 | Silica glass having superior durability against excimer laser beams and method for manufacturing the same | Hiroki Jinbo, Norio Komine, Akiko Yoshida | 2002-01-15 |
| 6291377 | Silica glass and its manufacturing method | Norio Komine, Hiroki Jinbo | 2001-09-18 |
| 6174830 | Silica glass having superior durability against excimer laser beams and method for manufacturing the same | Hiroki Jinbo, Norio Komine, Akiko Yoshida | 2001-01-16 |
| 6094940 | Manufacturing method of synthetic silica glass | Norio Komine, Hiroki Jinbo, Toshitsugu Suwa | 2000-08-01 |
| 6075607 | Method for estimating durability of optical member against excimer laser irradiation and method for selecting silica glass optical member | Hiroki Jinbo, Norio Komine | 2000-06-13 |
| 6061174 | Image-focusing optical system for ultraviolet laser | Masaki Shiozawa, Tsutomu Mizugaki, Shigeru Sakuma, Norio Komine, Hiroki Jinbo | 2000-05-09 |
| 5958809 | Fluorine-containing silica glass | Hiroyuki Hiraiwa, Kazuhiro Nakagawa, Shouji Yajima, Norio Komine, Hiroki Jinbo | 1999-09-28 |
| 5702495 | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production | Hiroyuki Hiraiwa, Kazuhiro Nakagawa, Hiroki Jinbo, Jun Takano | 1997-12-30 |
| 5703712 | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production | Norio Komine, Hiroki Jinbo, Hiroyuki Hiraiwa | 1997-12-30 |
| 5699183 | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production | Hiroyuki Hiraiwa, Hiroki Jinbo, Jun Takano, Norio Komine, Kazuhiro Nakagawa +1 more | 1997-12-16 |
| 5696624 | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production | Norio Komine, Hiroki Jinbo, Hiroyuki Hiraiwa | 1997-12-09 |
| 5679125 | Method for producing silica glass for use with light in a vacuum ultraviolet wavelength range | Hiroyuki Hiraiwa, Norio Komine | 1997-10-21 |