Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10458042 | Calcium fluoride member, method for producing same, and method for pressure-bonding calcium fluoride crystal | Minako Azumi, Shitoka SUZUKI | 2019-10-29 |
| 10074523 | Polycrystalline CaF2 member, member for plasma treatment device, plasma treatment device, and method for producing focusing ring | — | 2018-09-11 |
| 9613791 | Calcium fluoride optical member, manufacturing method therefor, gas-holding container, and light source device | Motofusa Kageyama | 2017-04-04 |
| 9580331 | CaF2 polycrystalline body, focus ring, plasma processing apparatus, and method for producing CaF2 polycrystalline body | Seishi Fujiwara, Yuka Narukawa | 2017-02-28 |