Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10025194 | Exposure apparatus, exposure method, and method for producing device | Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara, Yasushi Mizuno +3 more | 2018-07-17 |
| 9513558 | Exposure apparatus, exposure method, and method for producing device | Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara, Yasushi Mizuno +3 more | 2016-12-06 |
| 8749759 | Exposure apparatus, exposure method, and method for producing device | Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara, Yasushi Mizuno +3 more | 2014-06-10 |
| 8305552 | Exposure apparatus, exposure method, and method for producing device | Ikuo Hikima, Mitsunori Toyoda | 2012-11-06 |
| 8223318 | Illuminating optical apparatus, exposure apparatus and device manufacturing method | Kouji Muramatsu | 2012-07-17 |
| 8139198 | Exposure apparatus, exposure method, and method for producing device | Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara, Yasushi Mizuno +3 more | 2012-03-20 |
| 7515247 | Illumination optical system, exposure apparatus, and exposure method with polarized state fluctuation correcting device | Osamu Tanitsu, Hirohisa Tanaka, Kenichi Muramatsu, Norio Komine, Tomoyuki Matsuyama +1 more | 2009-04-07 |
| 7515248 | Illumination optical system, exposure apparatus, and exposure method with polarized state detection result and adjustment | Osamu Tanitsu, Hirohisa Tanaka, Kenichi Muramatsu, Norio Komine, Tomoyuki Matsuyama +1 more | 2009-04-07 |
| 7423731 | Illumination optical system, exposure apparatus, and exposure method with polarized switching device | Osamu Tanitsu, Hirohisa Tanaka, Kenichi Muramatsu, Norio Komine, Tomoyuki Matsuyama +1 more | 2008-09-09 |
| 6927836 | Exposure apparatus and exposure method capable of controlling illumination distribution | — | 2005-08-09 |
| 6771350 | Exposure apparatus and exposure method capable of controlling illumination distribution | — | 2004-08-03 |