Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9545658 | Piercing apparatus, plug used for piercing apparatus, and method for producing seamless steel pipe | Kazuhiro Shimoda, Tomio Yamakawa, Kouji Yamane, Yuji Inoue, Syusuke Shimooka | 2017-01-17 |
| 8953147 | Spatial light modulation unit, illumination optical apparatus, exposure apparatus, and device manufacturing method | — | 2015-02-10 |
| 8908151 | Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system | Osamu Tanitsu, Hirohisa Tanaka, Masaya Yamamoto, Norio Miyake, Yasushi Mizuno +3 more | 2014-12-09 |
| 8223318 | Illuminating optical apparatus, exposure apparatus and device manufacturing method | Hisashi Nishinaga | 2012-07-17 |
| 8144308 | Spatial light modulation unit, illumination optical apparatus, exposure apparatus, and device manufacturing method | — | 2012-03-27 |