Issued Patents All Time
Showing 25 most recent of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10768409 | Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method | — | 2020-09-08 |
| 10691026 | Illumination optical system, exposure apparatus, device production method, and light polarization unit | Hirohisa Tanaka, Kinya Kato, Takashi Mori | 2020-06-23 |
| 10241417 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama | 2019-03-26 |
| 10234770 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama | 2019-03-19 |
| 10203496 | Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method | — | 2019-02-12 |
| 10175583 | Illumination optical system, exposure apparatus, device production method, and light polarization unit | Hirohisa Tanaka, Kinya Kato, Takashi Mori | 2019-01-08 |
| 10025194 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara +3 more | 2018-07-17 |
| 10007194 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama | 2018-06-26 |
| 9857599 | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method | — | 2018-01-02 |
| 9817229 | Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method | — | 2017-11-14 |
| 9678332 | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method | — | 2017-06-13 |
| 9599905 | Illumination optical system, exposure apparatus, device production method, and light polarization unit | Hirohisa Tanaka, Kinya Kato, Takashi Mori | 2017-03-21 |
| 9513558 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara +3 more | 2016-12-06 |
| 9429848 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Koji Shigematsu, Hiroyuki Hirota | 2016-08-30 |
| 9423694 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama | 2016-08-23 |
| 9366970 | Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method | — | 2016-06-14 |
| 9341956 | Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method | — | 2016-05-17 |
| 9341954 | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method | — | 2016-05-17 |
| 9140990 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama | 2015-09-22 |
| 9116346 | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method | — | 2015-08-25 |
| 9057963 | Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method | — | 2015-06-16 |
| 9057877 | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method | — | 2015-06-16 |
| 8913227 | Illumination optical system, aligner, and process for fabricating device | — | 2014-12-16 |
| 8908151 | Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system | Kouji Muramatsu, Hirohisa Tanaka, Masaya Yamamoto, Norio Miyake, Yasushi Mizuno +3 more | 2014-12-09 |
| 8749759 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara +3 more | 2014-06-10 |