Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10241417 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Koji Shigematsu, Tomoyuki Matsuyama | 2019-03-26 |
| 10234770 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Koji Shigematsu, Tomoyuki Matsuyama | 2019-03-19 |
| 10166842 | Air-conditioning grill installation structure and air-conditioning grill installation method | — | 2019-01-01 |
| 10101666 | Illumination optical apparatus, exposure apparatus, and device manufacturing method | — | 2018-10-16 |
| 10007194 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Koji Shigematsu, Tomoyuki Matsuyama | 2018-06-26 |
| 9429848 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Koji Shigematsu | 2016-08-30 |
| 9423694 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Koji Shigematsu, Tomoyuki Matsuyama | 2016-08-23 |
| 9140990 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Koji Shigematsu, Tomoyuki Matsuyama | 2015-09-22 |
| 9097981 | Illumination optical apparatus, exposure apparatus, and device manufacturing method | — | 2015-08-04 |
| 8908151 | Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system | Kouji Muramatsu, Osamu Tanitsu, Hirohisa Tanaka, Masaya Yamamoto, Norio Miyake +3 more | 2014-12-09 |
| 8765633 | Catalyst for production of ethylene oxide and method for production of ethylene oxide | Hiromi Yunoki, Kenichi Ochiai | 2014-07-01 |
| 8637179 | Systems and methods for manufacturing a battery using a foldable covering member | — | 2014-01-28 |
| 8451430 | Illumination optical system, exposure apparatus, and device manufacturing method | Hirohisa Tanaka | 2013-05-28 |
| 8125791 | Portable electronic device | Takashi Hasegawa | 2012-02-28 |
| 8107259 | Portable electronic device | Kangmin Choe | 2012-01-31 |
| 8017546 | Catalyst for producing alkylene oxide, method for producing the same, and method for producing alkylene oxide using said catalyst | Masahide Shima, Tadashi Sento, Masatsugu Mikawa | 2011-09-13 |
| 7560577 | Catalyst for production of ethylene oxide and method for production of ethylene oxide | Hiromi Yunoki, Masatsugu Mikawa | 2009-07-14 |
| 7514176 | Battery having a molded resin portion | — | 2009-04-07 |
| 6636018 | Battery module and positioning structure therefor | — | 2003-10-21 |