Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854288 | Image determining device to determine the state of a subject | Tetsuya Yamamoto, Masahiro Nei, Isao Totsuka, Masamitsu Yanagihara, Satoshi Hagiwara +1 more | 2023-12-26 |
| 11055522 | Image determining device to determine the state of a subject | Tetsuya Yamamoto, Masahiro Nei, Isao Totsuka, Masamitsu Yanagihara, Satoshi Hagiwara +1 more | 2021-07-06 |
| 10846457 | Lithography system, simulation apparatus, and pattern forming method | Shintaro Kudo, Hirotaka Kohno | 2020-11-24 |
| 10338480 | Lithography system, simulation apparatus, and pattern forming method | Shintaro Kudo, Hirotaka Kohno | 2019-07-02 |
| 10275645 | Image determining device to determine the state of a subject | Tetsuya Yamamoto, Masahiro Nei, Isao Totsuka, Masamitsu Yanagihara, Satoshi Hagiwara +1 more | 2019-04-30 |
| 10255491 | Guidance system, detection device, and position assessment device | Masakazu Sekiguchi, Tetsuya Yamamoto, Masahiro Nei, Masamitsu Yanagihara, Satoshi Hagiwara +1 more | 2019-04-09 |
| 10241417 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota | 2019-03-26 |
| 10234770 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota | 2019-03-19 |
| 10234756 | Scanner based optical proximity correction system and method of use | Jacek Tyminski, Raluca Popescu | 2019-03-19 |
| 10007194 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota | 2018-06-26 |
| 9753363 | Scanner based optical proximity correction system and method of use | Jacek Tyminski, Raluca Popescu | 2017-09-05 |
| 9551938 | Light source optimizing method, exposure method, device manufacturing method, program, exposure apparatus, lithography system, light source evaluation method, and light source modulation method | Naonori Kita | 2017-01-24 |
| 9423694 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota | 2016-08-23 |
| 9286416 | Scanner based optical proximity correction system and method of use | Jacek Tyminski, Raluca Popescu | 2016-03-15 |
| 9140990 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota | 2015-09-22 |
| 9047751 | Image determining device to determine the state of a subject | Tetsuya Yamamoto, Masahiro Nei, Isao Totsuka, Masamitsu Yanagihara, Satoshi Hagiwara +1 more | 2015-06-02 |
| 8365107 | Scanner based optical proximity correction system and method of use | Jacek Tyminski, Raluca Popescu | 2013-01-29 |
| 8174456 | Control system and method for reducing directional error of antenna with biaxial gimbal structure | Go Omori, Hitoshi Maeno, Satoshi Adachi | 2012-05-08 |
| 7515247 | Illumination optical system, exposure apparatus, and exposure method with polarized state fluctuation correcting device | Osamu Tanitsu, Hirohisa Tanaka, Kenichi Muramatsu, Norio Komine, Hisashi Nishinaga +1 more | 2009-04-07 |
| 7515248 | Illumination optical system, exposure apparatus, and exposure method with polarized state detection result and adjustment | Osamu Tanitsu, Hirohisa Tanaka, Kenichi Muramatsu, Norio Komine, Hisashi Nishinaga +1 more | 2009-04-07 |
| 7423731 | Illumination optical system, exposure apparatus, and exposure method with polarized switching device | Osamu Tanitsu, Hirohisa Tanaka, Kenichi Muramatsu, Norio Komine, Hisashi Nishinaga +1 more | 2008-09-09 |
| 7405803 | Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium | Yasuo Shimizu, Shigeru Hirukawa, Kousuke Suzuki | 2008-07-29 |
| 7391497 | Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium | Yasuo Shimizu, Shigeru Hirukawa, Kousuke Suzuki | 2008-06-24 |
| 7230682 | Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium | Yasuo Shimizu, Shigeru Hirukawa, Kousuke Suzuki | 2007-06-12 |
| 7102728 | Imaging optical system evaluation method, imaging optical system adjustment method, exposure apparatus and exposure method | — | 2006-09-05 |