Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10025194 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara +3 more | 2018-07-17 |
| 9581811 | Method for evaluating and improving pupil luminance distribution, illumination optical system and adjustment method thereof, exposure apparatus, exposure method, and device manufacturing method | — | 2017-02-28 |
| 9551938 | Light source optimizing method, exposure method, device manufacturing method, program, exposure apparatus, lithography system, light source evaluation method, and light source modulation method | Tomoyuki Matsuyama | 2017-01-24 |
| 9513558 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara +3 more | 2016-12-06 |
| 9389519 | Measuring method and measuring apparatus of pupil transmittance distribution, exposure method and exposure apparatus, and device manufacturing method | — | 2016-07-12 |
| 9122170 | Transmission optical system, illumination optical system, exposure apparatus, and device manufacturing method | — | 2015-09-01 |
| 8749759 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara +3 more | 2014-06-10 |
| 8638420 | Optical integrator, illuminating optical device, exposure apparatus and device manufacturing method | — | 2014-01-28 |
| 8587764 | Optical integrator system, illumination optical apparatus, exposure apparatus, and device manufacturing method | — | 2013-11-19 |
| 8139198 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara +3 more | 2012-03-20 |
| 7706072 | Optical integrator, illumination optical device, photolithograph, photolithography, and method for fabricating device | — | 2010-04-27 |
| 7618767 | Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method | Mitsunori Toyoda | 2009-11-17 |