Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10281632 | Illumination optical apparatus, exposure apparatus, and exposure method with optical member with optical rotatory power to rotate linear polarization direction | — | 2019-05-07 |
| 10025194 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Masahiro Nakagawa, Tsuneyuki Hagiwara, Yasushi Mizuno +3 more | 2018-07-17 |
| 9885872 | Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light | — | 2018-02-06 |
| 9513558 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Masahiro Nakagawa, Tsuneyuki Hagiwara, Yasushi Mizuno +3 more | 2016-12-06 |
| 9164209 | Illumination optical apparatus, exposure apparatus, and exposure method with optical member with optical rotatory power having different thicknesses to rotate linear polarization direction | — | 2015-10-20 |
| 8749759 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Masahiro Nakagawa, Tsuneyuki Hagiwara, Yasushi Mizuno +3 more | 2014-06-10 |
| 8305552 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima | 2012-11-06 |
| 8139198 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Masahiro Nakagawa, Tsuneyuki Hagiwara, Yasushi Mizuno +3 more | 2012-03-20 |
| 7618767 | Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method | Naonori Kita | 2009-11-17 |
| 7379160 | Optical integrator, illumination optical device, exposure apparatus, and exposure method | — | 2008-05-27 |
| 7307693 | Illumination optical device, photolithography machine, and exposure method | — | 2007-12-11 |
| 7095560 | Diffractive optical device, refractive optical device, illumination optical system, exposure apparatus and exposure method | Osamu Tanitsu | 2006-08-22 |
| 6913373 | Optical illumination device, exposure device and exposure method | Hirohisa Tanaka, Osamu Tanitsu | 2005-07-05 |
| 6741394 | Optical integrator, illumination optical apparatus, exposure apparatus and observation apparatus | Osamu Tanitsu, Yuji Kudo, Masato Shibuya | 2004-05-25 |