Issued Patents All Time
Showing 25 most recent of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859376 | Information processing apparatus, information processing method, and non-transitory computer readable recording medium | — | 2020-12-08 |
| 10274313 | Measurement method and measurement program for calculating roughness of a curved surface | Hiroshi Sakai, Yutaka Watanabe, Yasuhiro Takahama, Harumasa Ito | 2019-04-30 |
| 8705034 | Evaluation device and evaluation method | Kazuhiko Fukazawa | 2014-04-22 |
| 8334977 | Evaluation device and evaluation method | Kazuhiko Fukazawa | 2012-12-18 |
| 7978310 | Projection optical system, exposure system, and exposure method | Hironori Ikezawa, Yasuhiro Omura | 2011-07-12 |
| 7907268 | Surface inspection method and surface inspection device | Yoshihiko Fujimori | 2011-03-15 |
| 7710653 | Projection optical system, exposure system, and exposure method | Hironori Ikezawa, Yasuhiro Omura | 2010-05-04 |
| 7706074 | Projection optical system, method of manufacturing projection optical system, exposure apparatus, and exposure method | Takeshi Iwasaki | 2010-04-27 |
| 6864959 | Projection exposure apparatus | Naomasa Shiraishi | 2005-03-08 |
| 6848409 | Intake system for an internal combustion engine | Masahiro Murata | 2005-02-01 |
| 6831406 | Electroluminescent device having a very thin emission layer | Masao Fukuyama, Mutsumi Suzuki, Yoshikazu Hori | 2004-12-14 |
| 6776132 | Intake arrangement for multi-cylinder engine | Masahiro Murata | 2004-08-17 |
| 6741394 | Optical integrator, illumination optical apparatus, exposure apparatus and observation apparatus | Osamu Tanitsu, Mitsunori Toyoda, Masato Shibuya | 2004-05-25 |
| 6730929 | Organic electroluminescent device | Masao Fukuyama, Mutsumi Suzuki, Yoshikazu Hori | 2004-05-04 |
| 6710854 | Projection exposure apparatus | Naomasa Shiraishi, Saburo Kamiya | 2004-03-23 |
| 6642994 | Optical exposure apparatus and photo-cleaning method | Takashi Mori, Tetsuo Takahashi, Hiroshi Nakamura, Taro Ogata | 2003-11-04 |
| 6549267 | Pulse-width extending optical systems, projection-exposure apparatus comprising same, and manufacturing methods using same | — | 2003-04-15 |
| 6392740 | Projection exposure apparatus | Naomasa Shiraishi | 2002-05-21 |
| 6377336 | Projection exposure apparatus | Naomasa Shiraishi, Saburo Kamiya | 2002-04-23 |
| 6281967 | Illumination apparatus, exposure apparatus and exposure method | — | 2001-08-28 |
| 6267091 | Rotary valve assembly and engine induction system using the rotary valve assembly | Masaya NISHIDA, Teruhiko Minegishi, Kunio Sato, Kazuo Muneoka | 2001-07-31 |
| 6268904 | Optical exposure apparatus and photo-cleaning method | Takashi Mori, Tetsuo Takahashi, Hiroshi Nakamura, Taro Ogata | 2001-07-31 |
| 6127095 | Illuminating optical device and semiconductor device manufacturing method | — | 2000-10-03 |
| 6100961 | Projection exposure apparatus and method | Naomasa Shiraishi | 2000-08-08 |
| 5986744 | Projection optical system, illumination apparatus, and exposure apparatus | Osamu Tanitsu | 1999-11-16 |