Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728159 | Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium | Kazuhiro Harada, Masayoshi Minami, Akihito Yoshino, Naoko Kitagawa, Shintaro Kogura +1 more | 2023-08-15 |
| 11535931 | Method of manufacturing semiconductor device, method of managing parts, and recording medium | Nobuhito Shima, Akihiro Sato, Yosuke KUWATA, Kenichi Maeda | 2022-12-27 |
| 11257669 | Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium | Kazuhiro Harada, Masayoshi Minami, Akihito Yoshino, Naoko Kitagawa, Shintaro Kogura +1 more | 2022-02-22 |
| 11035721 | Substrate processing apparatus, vibration detection system and non-transitory computer-readable recording medium | Mamoru Oishi, Yasuhiro Matsuda | 2021-06-15 |
| 9394607 | Substrate processing apparatus | Ryota Sasajima, Seiyo Nakashima, Tomoyasu Miyashita | 2016-07-19 |
| 6343583 | Intake manifold of internal combustion engine | — | 2002-02-05 |
| 6267091 | Rotary valve assembly and engine induction system using the rotary valve assembly | Yuji Kudo, Teruhiko Minegishi, Kunio Sato, Kazuo Muneoka | 2001-07-31 |