Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11198935 | Heating part, substrate processing apparatus, and method of manufacturing semiconductor device | Shinobu Sugiura, Yosuke KUWATA, Atsushi UMEKAWA, Kazuhiro Kimura, Akihiko Hiratsuka +2 more | 2021-12-14 |
| 10998205 | Substrate processing apparatus and manufacturing method of semiconductor device | Daigi KAMIMURA, Atsushi UMEKAWA | 2021-05-04 |
| 9394607 | Substrate processing apparatus | Masaya NISHIDA, Ryota Sasajima, Seiyo Nakashima | 2016-07-19 |
| 8453600 | Substrate processing apparatus | Nobuo Ishimaru | 2013-06-04 |