Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9373499 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani | 2016-06-21 |
| 9039912 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani | 2015-05-26 |
| 8875656 | Substrate processing apparatus | Tadashi Kontani, Tetsuo Yamamoto, Nobuhito Shima | 2014-11-04 |
| 8544411 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani | 2013-10-01 |
| 8518182 | Substrate processing apparatus | Shizue Ogawa, Kazuyuki Toyoda, Motonari Takebayashi, Tadashi Kontani | 2013-08-27 |
| 8453600 | Substrate processing apparatus | Tomoyasu Miyashita | 2013-06-04 |
| 8297224 | Substrate processing apparatus | — | 2012-10-30 |
| 8261692 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Taketoshi Sato, Toru Kagaya, Nobuhito Shima +5 more | 2012-09-11 |
| 8251012 | Substrate processing apparatus and semiconductor device producing method | — | 2012-08-28 |
| 8093072 | Substrate processing apparatus and method of manufacturing semiconductor device | — | 2012-01-10 |
| 8092603 | Substrate processing apparatus | Hironobu Shimizu | 2012-01-10 |
| 8047158 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Taketoshi Sato, Toru Kagaya, Nobuhito Shima +5 more | 2011-11-01 |
| 8028652 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani | 2011-10-04 |
| 8020514 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani | 2011-09-20 |
| 7958842 | Substrate processing apparatus | Shizue Ogawa, Kazuyuki Toyoda, Motonari Takebayashi, Tadashi Kontani | 2011-06-14 |
| 7900580 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Taketoshi Sato, Toru Kagaya, Nobuhito Shima +5 more | 2011-03-08 |
| 7861668 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani | 2011-01-04 |
| 7767053 | Substrate processing apparatus and substrate processing method | Tomohiko Takeda, Ken Sugihara, Katsuyoshi Hamano, Teruo Yoshino | 2010-08-03 |