Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9646862 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Atsushi UMEKAWA, Takuya JODA, Akinori Ishii, Masahisa Okuno | 2017-05-09 |
| 9472424 | Substrate processing apparatus and a method of manufacturing a semiconductor device | Yasutoshi TSUBOTA, Masayuki Tomita, Teruo Yoshino | 2016-10-18 |
| 9236246 | Substrate processing apparatus and a method of manufacturing a semiconductor device | Yasutoshi TSUBOTA, Masayuki Tomita, Teruo Yoshino | 2016-01-12 |
| 7767053 | Substrate processing apparatus and substrate processing method | Tomohiko Takeda, Ken Sugihara, Teruo Yoshino, Nobuo Ishimaru | 2010-08-03 |
| 5850071 | Substrate heating equipment for use in a semiconductor fabricating apparatus | Issei Makiguchi, Tokunobu Akao | 1998-12-15 |