Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12065741 | Substrate processing apparatus and method of manufacturing semiconductor device | Mikio Ohno, Takeo Hanashima, Hiroaki Hiramatsu | 2024-08-20 |
| 12050138 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Motoya Takewaki | 2024-07-30 |
| 11694907 | Substrate processing apparatus, recording medium, and fluid circulation mechanism | Toshiki Fujino, Takayuki Nakada | 2023-07-04 |
| 11365482 | Substrate processing apparatus and method of manufacturing semiconductor device | Mikio Ohno, Takeo Hanashima, Hiroaki Hiramatsu | 2022-06-21 |
| 11300456 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Motoya Takewaki | 2022-04-12 |
| 11198935 | Heating part, substrate processing apparatus, and method of manufacturing semiconductor device | Shinobu Sugiura, Yosuke KUWATA, Tomoyasu Miyashita, Kazuhiro Kimura, Akihiko Hiratsuka +2 more | 2021-12-14 |
| 10998205 | Substrate processing apparatus and manufacturing method of semiconductor device | Tomoyasu Miyashita, Daigi KAMIMURA | 2021-05-04 |
| D901406 | Inner tube of reactor for semiconductor fabrication | Toru Kagaya | 2020-11-10 |
| 10684174 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Motoya Takewaki | 2020-06-16 |
| 10640872 | Substrate processing apparatus and method of manufacturing semiconductor device | Mikio Ohno, Takeo Hanashima, Hiroaki Hiramatsu | 2020-05-05 |
| 10228291 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Motoya Takewaki | 2019-03-12 |
| 9646862 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Katsuyoshi Hamano, Takuya JODA, Akinori Ishii, Masahisa Okuno | 2017-05-09 |
| 9171724 | Substrate processing apparatus and method for manufacturing semiconductor device | Shinji Yashima | 2015-10-27 |
| 8987645 | Substrate processing apparatus having rotatable slot-type antenna and method of manufacturing semiconductor device using the same | Unryu Ogawa, Masahisa Okuno, Tokunobu Akao, Shinji Yashima, Kaichiro MINAMI | 2015-03-24 |
| 8557720 | Substrate processing apparatus and method of manufacturing a semiconductor device | Tokunobu Akao, Unryu Ogawa, Masahisa Okuno, Shinji Yashima, Kaichiro MINAMI | 2013-10-15 |
| 8486222 | Substrate processing apparatus and method of manufacturing a semiconductor device | Tokunobu Akao, Unryu Ogawa, Masahisa Okuno, Shinji Yashima, Kaichiro MINAMI | 2013-07-16 |